5/22/2011	12:42:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/22/2011	12:43:05 AM	Recipe started at 12:42 AM
5/22/2011	12:43:05 AM	Helium valve closed
5/22/2011	12:43:05 AM	H2 valve closed
5/22/2011	12:43:05 AM	BCl3 valve closed
5/22/2011	12:43:05 AM	PH3 valve closed
5/22/2011	12:43:05 AM	SiCl4 pre valve closed
5/22/2011	12:43:05 AM	SiCl4 post valve closed
5/22/2011	12:43:05 AM	Main Vac valve closed
5/22/2011	12:43:05 AM	Bubbler valve closed
5/22/2011	12:43:05 AM	Bypass valve opened
5/22/2011	12:43:05 AM	Helium MFC set to  0.000000
5/22/2011	12:43:05 AM	H2 MFC set to  0.000000
5/22/2011	12:43:05 AM	BCl3 MFC set to  0.000000
5/22/2011	12:43:05 AM	PHl3 MFC set to  0.000000
5/22/2011	12:43:05 AM	SiCl4 MFC set to  0.000000
5/22/2011	12:43:05 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	12:43:06 AM	Tube furnace set to 0
5/22/2011	12:43:06 AM	Helium valve closed
5/22/2011	12:43:06 AM	H2 valve closed
5/22/2011	12:43:06 AM	BCl3 valve closed
5/22/2011	12:43:06 AM	PH3 valve closed
5/22/2011	12:43:06 AM	SiCl4 pre valve closed
5/22/2011	12:43:06 AM	SiCl4 post valve closed
5/22/2011	12:43:06 AM	Bubbler valve closed
5/22/2011	12:43:06 AM	Main Vac valve opened
5/22/2011	12:43:06 AM	Bypass valve opened
5/22/2011	12:43:06 AM	Helium MFC set to  0.000000
5/22/2011	12:43:06 AM	H2 MFC set to  0.000000
5/22/2011	12:43:06 AM	BCl3 MFC set to  0.000000
5/22/2011	12:43:06 AM	PHl3 MFC set to  0.000000
5/22/2011	12:43:06 AM	SiCl4 MFC set to  0.000000
5/22/2011	12:43:06 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	12:43:06 AM	Tube furnace set to 0
5/22/2011	12:44:06 AM	H2 valve closed
5/22/2011	12:44:06 AM	BCl3 valve closed
5/22/2011	12:44:06 AM	PH3 valve closed
5/22/2011	12:44:06 AM	SiCl4 pre valve closed
5/22/2011	12:44:06 AM	SiCl4 post valve closed
5/22/2011	12:44:06 AM	Bubbler valve closed
5/22/2011	12:44:06 AM	Helium valve opened
5/22/2011	12:44:06 AM	Main Vac valve opened
5/22/2011	12:44:06 AM	Bypass valve opened
5/22/2011	12:44:06 AM	Helium MFC set to  100.000000
5/22/2011	12:44:06 AM	H2 MFC set to  0.000000
5/22/2011	12:44:06 AM	BCl3 MFC set to  0.000000
5/22/2011	12:44:06 AM	PHl3 MFC set to  0.000000
5/22/2011	12:44:06 AM	SiCl4 MFC set to  0.000000
5/22/2011	12:44:06 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	12:44:06 AM	Tube furnace set to 0
5/22/2011	12:45:06 AM	Helium valve closed
5/22/2011	12:45:06 AM	H2 valve closed
5/22/2011	12:45:06 AM	BCl3 valve closed
5/22/2011	12:45:06 AM	PH3 valve closed
5/22/2011	12:45:06 AM	SiCl4 pre valve closed
5/22/2011	12:45:06 AM	SiCl4 post valve closed
5/22/2011	12:45:06 AM	Bubbler valve closed
5/22/2011	12:45:06 AM	Main Vac valve opened
5/22/2011	12:45:06 AM	Bypass valve opened
5/22/2011	12:45:06 AM	Helium MFC set to  0.000000
5/22/2011	12:45:06 AM	H2 MFC set to  0.000000
5/22/2011	12:45:06 AM	BCl3 MFC set to  0.000000
5/22/2011	12:45:06 AM	PHl3 MFC set to  0.000000
5/22/2011	12:45:06 AM	SiCl4 MFC set to  0.000000
5/22/2011	12:45:06 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	12:45:06 AM	Tube furnace set to 0
5/22/2011	12:46:06 AM	H2 valve closed
5/22/2011	12:46:06 AM	BCl3 valve closed
5/22/2011	12:46:06 AM	PH3 valve closed
5/22/2011	12:46:06 AM	SiCl4 pre valve closed
5/22/2011	12:46:06 AM	SiCl4 post valve closed
5/22/2011	12:46:06 AM	Bubbler valve closed
5/22/2011	12:46:06 AM	Helium valve opened
5/22/2011	12:46:06 AM	Main Vac valve opened
5/22/2011	12:46:06 AM	Bypass valve opened
5/22/2011	12:46:06 AM	Helium MFC set to  100.000000
5/22/2011	12:46:06 AM	H2 MFC set to  0.000000
5/22/2011	12:46:06 AM	BCl3 MFC set to  0.000000
5/22/2011	12:46:06 AM	PHl3 MFC set to  0.000000
5/22/2011	12:46:06 AM	SiCl4 MFC set to  0.000000
5/22/2011	12:46:06 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	12:46:07 AM	Tube furnace set to 0
5/22/2011	12:47:07 AM	Helium valve closed
5/22/2011	12:47:07 AM	H2 valve closed
5/22/2011	12:47:07 AM	BCl3 valve closed
5/22/2011	12:47:07 AM	PH3 valve closed
5/22/2011	12:47:07 AM	SiCl4 pre valve closed
5/22/2011	12:47:07 AM	SiCl4 post valve closed
5/22/2011	12:47:07 AM	Bubbler valve closed
5/22/2011	12:47:07 AM	Main Vac valve opened
5/22/2011	12:47:07 AM	Bypass valve opened
5/22/2011	12:47:07 AM	Helium MFC set to  0.000000
5/22/2011	12:47:07 AM	H2 MFC set to  0.000000
5/22/2011	12:47:07 AM	BCl3 MFC set to  0.000000
5/22/2011	12:47:07 AM	PHl3 MFC set to  0.000000
5/22/2011	12:47:07 AM	SiCl4 MFC set to  0.000000
5/22/2011	12:47:07 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	12:47:07 AM	Tube furnace set to 0
5/22/2011	12:48:07 AM	H2 valve closed
5/22/2011	12:48:07 AM	BCl3 valve closed
5/22/2011	12:48:07 AM	PH3 valve closed
5/22/2011	12:48:07 AM	SiCl4 pre valve closed
5/22/2011	12:48:07 AM	SiCl4 post valve closed
5/22/2011	12:48:07 AM	Bubbler valve closed
5/22/2011	12:48:07 AM	Helium valve opened
5/22/2011	12:48:07 AM	Main Vac valve opened
5/22/2011	12:48:07 AM	Bypass valve opened
5/22/2011	12:48:07 AM	Helium MFC set to  100.000000
5/22/2011	12:48:07 AM	H2 MFC set to  0.000000
5/22/2011	12:48:07 AM	BCl3 MFC set to  0.000000
5/22/2011	12:48:07 AM	PHl3 MFC set to  0.000000
5/22/2011	12:48:07 AM	SiCl4 MFC set to  0.000000
5/22/2011	12:48:07 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	12:48:07 AM	Tube furnace set to 0
5/22/2011	12:49:07 AM	Helium valve closed
5/22/2011	12:49:07 AM	H2 valve closed
5/22/2011	12:49:07 AM	BCl3 valve closed
5/22/2011	12:49:07 AM	PH3 valve closed
5/22/2011	12:49:07 AM	SiCl4 pre valve closed
5/22/2011	12:49:07 AM	SiCl4 post valve closed
5/22/2011	12:49:07 AM	Bubbler valve closed
5/22/2011	12:49:07 AM	Main Vac valve opened
5/22/2011	12:49:07 AM	Bypass valve opened
5/22/2011	12:49:07 AM	Helium MFC set to  0.000000
5/22/2011	12:49:07 AM	H2 MFC set to  0.000000
5/22/2011	12:49:07 AM	BCl3 MFC set to  0.000000
5/22/2011	12:49:07 AM	PHl3 MFC set to  0.000000
5/22/2011	12:49:07 AM	SiCl4 MFC set to  0.000000
5/22/2011	12:49:07 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	12:49:07 AM	Tube furnace set to 0
5/22/2011	12:50:07 AM	H2 valve closed
5/22/2011	12:50:07 AM	BCl3 valve closed
5/22/2011	12:50:07 AM	PH3 valve closed
5/22/2011	12:50:07 AM	SiCl4 pre valve closed
5/22/2011	12:50:07 AM	SiCl4 post valve closed
5/22/2011	12:50:07 AM	Bubbler valve closed
5/22/2011	12:50:07 AM	Helium valve opened
5/22/2011	12:50:07 AM	Main Vac valve opened
5/22/2011	12:50:07 AM	Bypass valve opened
5/22/2011	12:50:07 AM	Helium MFC set to  100.000000
5/22/2011	12:50:07 AM	H2 MFC set to  0.000000
5/22/2011	12:50:07 AM	BCl3 MFC set to  0.000000
5/22/2011	12:50:07 AM	PHl3 MFC set to  0.000000
5/22/2011	12:50:07 AM	SiCl4 MFC set to  0.000000
5/22/2011	12:50:07 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	12:50:07 AM	Tube furnace set to 0
5/22/2011	12:51:07 AM	Helium valve closed
5/22/2011	12:51:07 AM	H2 valve closed
5/22/2011	12:51:07 AM	BCl3 valve closed
5/22/2011	12:51:07 AM	PH3 valve closed
5/22/2011	12:51:07 AM	SiCl4 pre valve closed
5/22/2011	12:51:07 AM	SiCl4 post valve closed
5/22/2011	12:51:07 AM	Bubbler valve closed
5/22/2011	12:51:07 AM	Main Vac valve opened
5/22/2011	12:51:07 AM	Bypass valve opened
5/22/2011	12:51:07 AM	Helium MFC set to  0.000000
5/22/2011	12:51:07 AM	H2 MFC set to  0.000000
5/22/2011	12:51:07 AM	BCl3 MFC set to  0.000000
5/22/2011	12:51:07 AM	PHl3 MFC set to  0.000000
5/22/2011	12:51:07 AM	SiCl4 MFC set to  0.000000
5/22/2011	12:51:07 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	12:51:08 AM	Tube furnace set to 0
5/22/2011	12:52:08 AM	H2 valve closed
5/22/2011	12:52:08 AM	BCl3 valve closed
5/22/2011	12:52:08 AM	PH3 valve closed
5/22/2011	12:52:08 AM	SiCl4 pre valve closed
5/22/2011	12:52:08 AM	SiCl4 post valve closed
5/22/2011	12:52:08 AM	Bubbler valve closed
5/22/2011	12:52:08 AM	Helium valve opened
5/22/2011	12:52:08 AM	Main Vac valve opened
5/22/2011	12:52:08 AM	Bypass valve opened
5/22/2011	12:52:08 AM	Helium MFC set to  100.000000
5/22/2011	12:52:08 AM	H2 MFC set to  0.000000
5/22/2011	12:52:08 AM	BCl3 MFC set to  0.000000
5/22/2011	12:52:08 AM	PHl3 MFC set to  0.000000
5/22/2011	12:52:08 AM	SiCl4 MFC set to  0.000000
5/22/2011	12:52:08 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	12:52:08 AM	Tube furnace set to 0
5/22/2011	12:53:08 AM	Helium valve closed
5/22/2011	12:53:08 AM	H2 valve closed
5/22/2011	12:53:08 AM	BCl3 valve closed
5/22/2011	12:53:08 AM	PH3 valve closed
5/22/2011	12:53:08 AM	SiCl4 pre valve closed
5/22/2011	12:53:08 AM	SiCl4 post valve closed
5/22/2011	12:53:08 AM	Bubbler valve closed
5/22/2011	12:53:08 AM	Main Vac valve opened
5/22/2011	12:53:08 AM	Bypass valve opened
5/22/2011	12:53:08 AM	Helium MFC set to  0.000000
5/22/2011	12:53:08 AM	H2 MFC set to  0.000000
5/22/2011	12:53:08 AM	BCl3 MFC set to  0.000000
5/22/2011	12:53:08 AM	PHl3 MFC set to  0.000000
5/22/2011	12:53:08 AM	SiCl4 MFC set to  0.000000
5/22/2011	12:53:08 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	12:53:08 AM	Tube furnace set to 0
5/22/2011	12:54:08 AM	H2 valve closed
5/22/2011	12:54:08 AM	BCl3 valve closed
5/22/2011	12:54:08 AM	PH3 valve closed
5/22/2011	12:54:08 AM	SiCl4 pre valve closed
5/22/2011	12:54:08 AM	SiCl4 post valve closed
5/22/2011	12:54:08 AM	Bubbler valve closed
5/22/2011	12:54:08 AM	Helium valve opened
5/22/2011	12:54:08 AM	Main Vac valve opened
5/22/2011	12:54:08 AM	Bypass valve opened
5/22/2011	12:54:08 AM	Helium MFC set to  100.000000
5/22/2011	12:54:08 AM	H2 MFC set to  0.000000
5/22/2011	12:54:08 AM	BCl3 MFC set to  0.000000
5/22/2011	12:54:08 AM	PHl3 MFC set to  0.000000
5/22/2011	12:54:08 AM	SiCl4 MFC set to  0.000000
5/22/2011	12:54:08 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	12:54:08 AM	Tube furnace set to 0
5/22/2011	12:55:08 AM	Helium valve closed
5/22/2011	12:55:08 AM	H2 valve closed
5/22/2011	12:55:08 AM	BCl3 valve closed
5/22/2011	12:55:08 AM	PH3 valve closed
5/22/2011	12:55:08 AM	SiCl4 pre valve closed
5/22/2011	12:55:08 AM	SiCl4 post valve closed
5/22/2011	12:55:08 AM	Bubbler valve closed
5/22/2011	12:55:08 AM	Main Vac valve opened
5/22/2011	12:55:08 AM	Bypass valve opened
5/22/2011	12:55:08 AM	Helium MFC set to  0.000000
5/22/2011	12:55:08 AM	H2 MFC set to  0.000000
5/22/2011	12:55:08 AM	BCl3 MFC set to  0.000000
5/22/2011	12:55:08 AM	PHl3 MFC set to  0.000000
5/22/2011	12:55:08 AM	SiCl4 MFC set to  0.000000
5/22/2011	12:55:08 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	12:55:08 AM	Tube furnace set to 0
5/22/2011	12:56:08 AM	H2 valve closed
5/22/2011	12:56:08 AM	BCl3 valve closed
5/22/2011	12:56:08 AM	PH3 valve closed
5/22/2011	12:56:08 AM	SiCl4 pre valve closed
5/22/2011	12:56:08 AM	SiCl4 post valve closed
5/22/2011	12:56:08 AM	Bubbler valve closed
5/22/2011	12:56:08 AM	Helium valve opened
5/22/2011	12:56:08 AM	Main Vac valve opened
5/22/2011	12:56:08 AM	Bypass valve opened
5/22/2011	12:56:08 AM	Helium MFC set to  100.000000
5/22/2011	12:56:08 AM	H2 MFC set to  0.000000
5/22/2011	12:56:08 AM	BCl3 MFC set to  0.000000
5/22/2011	12:56:08 AM	PHl3 MFC set to  0.000000
5/22/2011	12:56:09 AM	SiCl4 MFC set to  0.000000
5/22/2011	12:56:09 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	12:56:09 AM	Tube furnace set to 0
5/22/2011	12:57:09 AM	Helium valve closed
5/22/2011	12:57:09 AM	H2 valve closed
5/22/2011	12:57:09 AM	BCl3 valve closed
5/22/2011	12:57:09 AM	PH3 valve closed
5/22/2011	12:57:09 AM	SiCl4 pre valve closed
5/22/2011	12:57:09 AM	SiCl4 post valve closed
5/22/2011	12:57:09 AM	Bubbler valve closed
5/22/2011	12:57:09 AM	Main Vac valve opened
5/22/2011	12:57:09 AM	Bypass valve opened
5/22/2011	12:57:09 AM	Helium MFC set to  0.000000
5/22/2011	12:57:09 AM	H2 MFC set to  0.000000
5/22/2011	12:57:09 AM	BCl3 MFC set to  0.000000
5/22/2011	12:57:09 AM	PHl3 MFC set to  0.000000
5/22/2011	12:57:09 AM	SiCl4 MFC set to  0.000000
5/22/2011	12:57:09 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	12:57:09 AM	Tube furnace set to 0
5/22/2011	12:58:09 AM	H2 valve closed
5/22/2011	12:58:09 AM	BCl3 valve closed
5/22/2011	12:58:09 AM	PH3 valve closed
5/22/2011	12:58:09 AM	SiCl4 pre valve closed
5/22/2011	12:58:09 AM	SiCl4 post valve closed
5/22/2011	12:58:09 AM	Bubbler valve closed
5/22/2011	12:58:09 AM	Helium valve opened
5/22/2011	12:58:09 AM	Main Vac valve opened
5/22/2011	12:58:09 AM	Bypass valve opened
5/22/2011	12:58:09 AM	Helium MFC set to  100.000000
5/22/2011	12:58:09 AM	H2 MFC set to  0.000000
5/22/2011	12:58:09 AM	BCl3 MFC set to  0.000000
5/22/2011	12:58:09 AM	PHl3 MFC set to  0.000000
5/22/2011	12:58:09 AM	SiCl4 MFC set to  0.000000
5/22/2011	12:58:09 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	12:58:09 AM	Tube furnace set to 0
5/22/2011	12:59:09 AM	Helium valve closed
5/22/2011	12:59:09 AM	H2 valve closed
5/22/2011	12:59:09 AM	BCl3 valve closed
5/22/2011	12:59:09 AM	PH3 valve closed
5/22/2011	12:59:09 AM	SiCl4 pre valve closed
5/22/2011	12:59:09 AM	SiCl4 post valve closed
5/22/2011	12:59:09 AM	Bubbler valve closed
5/22/2011	12:59:09 AM	Main Vac valve opened
5/22/2011	12:59:09 AM	Bypass valve opened
5/22/2011	12:59:09 AM	Helium MFC set to  0.000000
5/22/2011	12:59:09 AM	H2 MFC set to  0.000000
5/22/2011	12:59:09 AM	BCl3 MFC set to  0.000000
5/22/2011	12:59:09 AM	PHl3 MFC set to  0.000000
5/22/2011	12:59:09 AM	SiCl4 MFC set to  0.000000
5/22/2011	12:59:09 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	12:59:09 AM	Tube furnace set to 0
5/22/2011	1:00:09 AM	H2 valve closed
5/22/2011	1:00:09 AM	BCl3 valve closed
5/22/2011	1:00:09 AM	PH3 valve closed
5/22/2011	1:00:09 AM	SiCl4 pre valve closed
5/22/2011	1:00:09 AM	SiCl4 post valve closed
5/22/2011	1:00:09 AM	Bubbler valve closed
5/22/2011	1:00:09 AM	Helium valve opened
5/22/2011	1:00:09 AM	Main Vac valve opened
5/22/2011	1:00:09 AM	Bypass valve opened
5/22/2011	1:00:09 AM	Helium MFC set to  100.000000
5/22/2011	1:00:09 AM	H2 MFC set to  0.000000
5/22/2011	1:00:09 AM	BCl3 MFC set to  0.000000
5/22/2011	1:00:09 AM	PHl3 MFC set to  0.000000
5/22/2011	1:00:09 AM	SiCl4 MFC set to  0.000000
5/22/2011	1:00:09 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	1:00:09 AM	Tube furnace set to 0
5/22/2011	1:01:09 AM	Helium valve closed
5/22/2011	1:01:09 AM	H2 valve closed
5/22/2011	1:01:09 AM	BCl3 valve closed
5/22/2011	1:01:09 AM	PH3 valve closed
5/22/2011	1:01:09 AM	SiCl4 pre valve closed
5/22/2011	1:01:09 AM	SiCl4 post valve closed
5/22/2011	1:01:09 AM	Bubbler valve closed
5/22/2011	1:01:10 AM	Main Vac valve opened
5/22/2011	1:01:10 AM	Bypass valve opened
5/22/2011	1:01:10 AM	Helium MFC set to  0.000000
5/22/2011	1:01:10 AM	H2 MFC set to  0.000000
5/22/2011	1:01:10 AM	BCl3 MFC set to  0.000000
5/22/2011	1:01:10 AM	PHl3 MFC set to  0.000000
5/22/2011	1:01:10 AM	SiCl4 MFC set to  0.000000
5/22/2011	1:01:10 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	1:01:10 AM	Tube furnace set to 0
5/22/2011	1:02:10 AM	H2 valve closed
5/22/2011	1:02:10 AM	BCl3 valve closed
5/22/2011	1:02:10 AM	PH3 valve closed
5/22/2011	1:02:10 AM	SiCl4 pre valve closed
5/22/2011	1:02:10 AM	SiCl4 post valve closed
5/22/2011	1:02:10 AM	Bubbler valve closed
5/22/2011	1:02:10 AM	Helium valve opened
5/22/2011	1:02:10 AM	Main Vac valve opened
5/22/2011	1:02:10 AM	Bypass valve opened
5/22/2011	1:02:10 AM	Helium MFC set to  100.000000
5/22/2011	1:02:10 AM	H2 MFC set to  0.000000
5/22/2011	1:02:10 AM	BCl3 MFC set to  0.000000
5/22/2011	1:02:10 AM	PHl3 MFC set to  0.000000
5/22/2011	1:02:10 AM	SiCl4 MFC set to  0.000000
5/22/2011	1:02:10 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	1:02:10 AM	Tube furnace set to 0
5/22/2011	1:03:10 AM	Helium valve closed
5/22/2011	1:03:10 AM	H2 valve closed
5/22/2011	1:03:10 AM	BCl3 valve closed
5/22/2011	1:03:10 AM	PH3 valve closed
5/22/2011	1:03:10 AM	SiCl4 pre valve closed
5/22/2011	1:03:10 AM	SiCl4 post valve closed
5/22/2011	1:03:10 AM	Bubbler valve closed
5/22/2011	1:03:10 AM	Main Vac valve opened
5/22/2011	1:03:10 AM	Bypass valve opened
5/22/2011	1:03:10 AM	Helium MFC set to  0.000000
5/22/2011	1:03:10 AM	H2 MFC set to  0.000000
5/22/2011	1:03:10 AM	BCl3 MFC set to  0.000000
5/22/2011	1:03:10 AM	PHl3 MFC set to  0.000000
5/22/2011	1:03:10 AM	SiCl4 MFC set to  0.000000
5/22/2011	1:03:10 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	1:03:10 AM	Tube furnace set to 0
5/22/2011	1:03:11 AM	Run finished at 1:03 AM
5/22/2011	1:03:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/22/2011	1:03:54 AM	Recipe started at 1:03 AM
5/22/2011	1:03:54 AM	Helium valve closed
5/22/2011	1:03:54 AM	BCl3 valve closed
5/22/2011	1:03:54 AM	PH3 valve closed
5/22/2011	1:03:54 AM	SiCl4 pre valve closed
5/22/2011	1:03:54 AM	SiCl4 post valve closed
5/22/2011	1:03:54 AM	Main Vac valve closed
5/22/2011	1:03:54 AM	Bypass valve closed
5/22/2011	1:03:54 AM	Bubbler valve closed
5/22/2011	1:03:54 AM	H2 valve opened
5/22/2011	1:03:54 AM	Helium MFC set to  0.000000
5/22/2011	1:03:54 AM	H2 MFC set to  500.000000
5/22/2011	1:03:54 AM	BCl3 MFC set to  0.000000
5/22/2011	1:03:54 AM	PHl3 MFC set to  0.000000
5/22/2011	1:03:54 AM	SiCl4 MFC set to  0.000000
5/22/2011	1:03:54 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	1:03:54 AM	Tube furnace set to 0
5/22/2011	1:05:15 AM	Helium valve closed
5/22/2011	1:05:15 AM	BCl3 valve closed
5/22/2011	1:05:15 AM	PH3 valve closed
5/22/2011	1:05:15 AM	SiCl4 pre valve closed
5/22/2011	1:05:15 AM	SiCl4 post valve closed
5/22/2011	1:05:15 AM	Main Vac valve closed
5/22/2011	1:05:15 AM	Bypass valve closed
5/22/2011	1:05:15 AM	H2 valve opened
5/22/2011	1:05:15 AM	Bubbler valve opened
5/22/2011	1:05:15 AM	Helium MFC set to  0.000000
5/22/2011	1:05:15 AM	H2 MFC set to  500.000000
5/22/2011	1:05:15 AM	BCl3 MFC set to  0.000000
5/22/2011	1:05:15 AM	PHl3 MFC set to  0.000000
5/22/2011	1:05:15 AM	SiCl4 MFC set to  0.000000
5/22/2011	1:05:15 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	1:05:15 AM	Tube furnace set to 250
5/22/2011	1:16:48 AM	Run aborted at 1:16 AM
5/22/2011	1:16:48 AM	Helium valve closed
5/22/2011	1:16:48 AM	H2 valve closed
5/22/2011	1:16:49 AM	BCl3 valve closed
5/22/2011	1:16:49 AM	PH3 valve closed
5/22/2011	1:16:49 AM	SiCl4 pre valve closed
5/22/2011	1:16:49 AM	SiCl4 post valve closed
5/22/2011	1:16:49 AM	Bypass valve closed
5/22/2011	1:16:49 AM	Main Vac valve closed
5/22/2011	1:16:49 AM	Bubbler valve closed
5/22/2011	1:16:49 AM	Helium MFC set to  0.000000
5/22/2011	1:16:49 AM	H2 MFC set to  0.000000
5/22/2011	1:16:49 AM	BCl3 MFC set to  0.000000
5/22/2011	1:16:49 AM	PHl3 MFC set to  0.000000
5/22/2011	1:16:49 AM	SiCl4 MFC set to  0.000000
5/22/2011	1:16:49 AM	Tube furnace set to 0
5/22/2011	1:17:21 AM	Recipe started at 1:17 AM
5/22/2011	1:17:21 AM	Helium valve closed
5/22/2011	1:17:21 AM	BCl3 valve closed
5/22/2011	1:17:21 AM	PH3 valve closed
5/22/2011	1:17:21 AM	SiCl4 pre valve closed
5/22/2011	1:17:21 AM	SiCl4 post valve closed
5/22/2011	1:17:21 AM	Main Vac valve closed
5/22/2011	1:17:21 AM	Bypass valve closed
5/22/2011	1:17:21 AM	Bubbler valve closed
5/22/2011	1:17:21 AM	H2 valve opened
5/22/2011	1:17:21 AM	Helium MFC set to  0.000000
5/22/2011	1:17:21 AM	H2 MFC set to  500.000000
5/22/2011	1:17:21 AM	BCl3 MFC set to  0.000000
5/22/2011	1:17:21 AM	PHl3 MFC set to  0.000000
5/22/2011	1:17:21 AM	SiCl4 MFC set to  0.000000
5/22/2011	1:17:21 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	1:17:21 AM	Tube furnace set to 0
5/22/2011	1:17:23 AM	Helium valve closed
5/22/2011	1:17:23 AM	BCl3 valve closed
5/22/2011	1:17:23 AM	PH3 valve closed
5/22/2011	1:17:23 AM	SiCl4 pre valve closed
5/22/2011	1:17:23 AM	SiCl4 post valve closed
5/22/2011	1:17:23 AM	Main Vac valve closed
5/22/2011	1:17:23 AM	Bypass valve closed
5/22/2011	1:17:23 AM	H2 valve opened
5/22/2011	1:17:23 AM	Bubbler valve opened
5/22/2011	1:17:23 AM	Helium MFC set to  0.000000
5/22/2011	1:17:23 AM	H2 MFC set to  500.000000
5/22/2011	1:17:23 AM	BCl3 MFC set to  0.000000
5/22/2011	1:17:23 AM	PHl3 MFC set to  0.000000
5/22/2011	1:17:23 AM	SiCl4 MFC set to  0.000000
5/22/2011	1:17:23 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	1:17:23 AM	Tube furnace set to 250
5/22/2011	1:28:35 AM	Helium valve closed
5/22/2011	1:28:35 AM	BCl3 valve closed
5/22/2011	1:28:35 AM	PH3 valve closed
5/22/2011	1:28:35 AM	SiCl4 pre valve closed
5/22/2011	1:28:35 AM	SiCl4 post valve closed
5/22/2011	1:28:35 AM	Main Vac valve closed
5/22/2011	1:28:35 AM	Bypass valve closed
5/22/2011	1:28:35 AM	H2 valve opened
5/22/2011	1:28:35 AM	Bubbler valve opened
5/22/2011	1:28:35 AM	Helium MFC set to  0.000000
5/22/2011	1:28:35 AM	H2 MFC set to  500.000000
5/22/2011	1:28:35 AM	BCl3 MFC set to  0.000000
5/22/2011	1:28:35 AM	PHl3 MFC set to  0.000000
5/22/2011	1:28:35 AM	SiCl4 MFC set to  0.000000
5/22/2011	1:28:35 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	1:28:35 AM	Tube furnace set to 1000
5/22/2011	1:48:35 AM	Helium valve closed
5/22/2011	1:48:35 AM	BCl3 valve closed
5/22/2011	1:48:35 AM	Main Vac valve closed
5/22/2011	1:48:35 AM	Bypass valve closed
5/22/2011	1:48:35 AM	H2 valve opened
5/22/2011	1:48:35 AM	PH3 valve opened
5/22/2011	1:48:35 AM	SiCl4 pre valve opened
5/22/2011	1:48:35 AM	SiCl4 post valve opened
5/22/2011	1:48:35 AM	Bubbler valve opened
5/22/2011	1:48:35 AM	Helium MFC set to  0.000000
5/22/2011	1:48:35 AM	H2 MFC set to  500.000000
5/22/2011	1:48:35 AM	BCl3 MFC set to  0.000000
5/22/2011	1:48:35 AM	PHl3 MFC set to  1.000000
5/22/2011	1:48:35 AM	SiCl4 MFC set to  50.000000
5/22/2011	1:48:35 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	1:48:35 AM	Tube furnace set to 1000
5/22/2011	2:04:35 AM	H2 valve closed
5/22/2011	2:04:35 AM	BCl3 valve closed
5/22/2011	2:04:35 AM	PH3 valve closed
5/22/2011	2:04:35 AM	SiCl4 pre valve closed
5/22/2011	2:04:35 AM	SiCl4 post valve closed
5/22/2011	2:04:35 AM	Main Vac valve closed
5/22/2011	2:04:35 AM	Bypass valve closed
5/22/2011	2:04:35 AM	Helium valve opened
5/22/2011	2:04:35 AM	Bubbler valve opened
5/22/2011	2:04:35 AM	Helium MFC set to  500.000000
5/22/2011	2:04:35 AM	H2 MFC set to  0.000000
5/22/2011	2:04:35 AM	BCl3 MFC set to  0.000000
5/22/2011	2:04:35 AM	PHl3 MFC set to  0.000000
5/22/2011	2:04:35 AM	SiCl4 MFC set to  0.000000
5/22/2011	2:04:35 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	2:04:35 AM	Tube furnace set to 0
5/22/2011	2:24:35 AM	Helium valve closed
5/22/2011	2:24:35 AM	H2 valve closed
5/22/2011	2:24:35 AM	BCl3 valve closed
5/22/2011	2:24:35 AM	PH3 valve closed
5/22/2011	2:24:35 AM	SiCl4 pre valve closed
5/22/2011	2:24:35 AM	SiCl4 post valve closed
5/22/2011	2:24:35 AM	Main Vac valve closed
5/22/2011	2:24:35 AM	Bypass valve closed
5/22/2011	2:24:35 AM	Bubbler valve closed
5/22/2011	2:24:35 AM	Helium MFC set to  0.000000
5/22/2011	2:24:35 AM	H2 MFC set to  0.000000
5/22/2011	2:24:35 AM	BCl3 MFC set to  0.000000
5/22/2011	2:24:35 AM	PHl3 MFC set to  0.000000
5/22/2011	2:24:35 AM	SiCl4 MFC set to  0.000000
5/22/2011	2:24:35 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	2:24:35 AM	Tube furnace set to 0
5/22/2011	2:24:36 AM	Run finished at 2:24 AM
5/22/2011	2:33:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/22/2011	2:33:50 AM	Recipe started at 2:33 AM
5/22/2011	2:33:50 AM	H2 valve closed
5/22/2011	2:33:50 AM	BCl3 valve closed
5/22/2011	2:33:50 AM	PH3 valve closed
5/22/2011	2:33:50 AM	SiCl4 pre valve closed
5/22/2011	2:33:50 AM	SiCl4 post valve closed
5/22/2011	2:33:50 AM	Main Vac valve closed
5/22/2011	2:33:50 AM	Bypass valve closed
5/22/2011	2:33:50 AM	Bubbler valve closed
5/22/2011	2:33:50 AM	Helium valve opened
5/22/2011	2:33:50 AM	Helium MFC set to  500.000000
5/22/2011	2:33:50 AM	H2 MFC set to  0.000000
5/22/2011	2:33:50 AM	BCl3 MFC set to  0.000000
5/22/2011	2:33:50 AM	PHl3 MFC set to  0.000000
5/22/2011	2:33:50 AM	SiCl4 MFC set to  0.000000
5/22/2011	2:33:50 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	2:33:50 AM	Tube furnace set to 0
5/22/2011	2:33:51 AM	Helium valve closed
5/22/2011	2:33:51 AM	H2 valve closed
5/22/2011	2:33:51 AM	BCl3 valve closed
5/22/2011	2:33:51 AM	PH3 valve closed
5/22/2011	2:33:51 AM	SiCl4 pre valve closed
5/22/2011	2:33:51 AM	SiCl4 post valve closed
5/22/2011	2:33:51 AM	Main Vac valve closed
5/22/2011	2:33:51 AM	Bypass valve closed
5/22/2011	2:33:51 AM	Bubbler valve closed
5/22/2011	2:33:51 AM	Helium MFC set to  0.000000
5/22/2011	2:33:51 AM	H2 MFC set to  0.000000
5/22/2011	2:33:51 AM	BCl3 MFC set to  0.000000
5/22/2011	2:33:51 AM	PHl3 MFC set to  0.000000
5/22/2011	2:33:51 AM	SiCl4 MFC set to  0.000000
5/22/2011	2:33:51 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	2:33:51 AM	Tube furnace set to 0
5/22/2011	2:33:51 AM	Run finished at 2:33 AM
5/22/2011	2:33:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/22/2011	2:35:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/22/2011	2:35:26 AM	Recipe started at 2:35 AM
5/22/2011	2:35:26 AM	H2 valve closed
5/22/2011	2:35:26 AM	BCl3 valve closed
5/22/2011	2:35:26 AM	PH3 valve closed
5/22/2011	2:35:26 AM	SiCl4 pre valve closed
5/22/2011	2:35:26 AM	SiCl4 post valve closed
5/22/2011	2:35:26 AM	Main Vac valve closed
5/22/2011	2:35:26 AM	Bypass valve closed
5/22/2011	2:35:26 AM	Bubbler valve closed
5/22/2011	2:35:26 AM	Helium valve opened
5/22/2011	2:35:26 AM	Helium MFC set to  500.000000
5/22/2011	2:35:26 AM	H2 MFC set to  0.000000
5/22/2011	2:35:26 AM	BCl3 MFC set to  0.000000
5/22/2011	2:35:26 AM	PHl3 MFC set to  0.000000
5/22/2011	2:35:26 AM	SiCl4 MFC set to  0.000000
5/22/2011	2:35:26 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	2:35:26 AM	Tube furnace set to 0
5/22/2011	2:35:28 AM	Helium valve closed
5/22/2011	2:35:29 AM	H2 valve closed
5/22/2011	2:35:29 AM	BCl3 valve closed
5/22/2011	2:35:29 AM	PH3 valve closed
5/22/2011	2:35:29 AM	SiCl4 pre valve closed
5/22/2011	2:35:29 AM	SiCl4 post valve closed
5/22/2011	2:35:29 AM	Main Vac valve closed
5/22/2011	2:35:29 AM	Bypass valve closed
5/22/2011	2:35:29 AM	Bubbler valve closed
5/22/2011	2:35:29 AM	Helium MFC set to  0.000000
5/22/2011	2:35:29 AM	H2 MFC set to  0.000000
5/22/2011	2:35:29 AM	BCl3 MFC set to  0.000000
5/22/2011	2:35:29 AM	PHl3 MFC set to  0.000000
5/22/2011	2:35:29 AM	SiCl4 MFC set to  0.000000
5/22/2011	2:35:29 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	2:35:29 AM	Tube furnace set to 0
5/22/2011	2:35:29 AM	Run finished at 2:35 AM
5/22/2011	2:35:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/22/2011	2:37:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/22/2011	2:37:43 AM	Recipe started at 2:37 AM
5/22/2011	2:37:43 AM	H2 valve closed
5/22/2011	2:37:43 AM	BCl3 valve closed
5/22/2011	2:37:43 AM	PH3 valve closed
5/22/2011	2:37:43 AM	SiCl4 pre valve closed
5/22/2011	2:37:43 AM	SiCl4 post valve closed
5/22/2011	2:37:43 AM	Main Vac valve closed
5/22/2011	2:37:43 AM	Bypass valve closed
5/22/2011	2:37:43 AM	Bubbler valve closed
5/22/2011	2:37:43 AM	Helium valve opened
5/22/2011	2:37:43 AM	Helium MFC set to  500.000000
5/22/2011	2:37:43 AM	H2 MFC set to  0.000000
5/22/2011	2:37:43 AM	BCl3 MFC set to  0.000000
5/22/2011	2:37:43 AM	PHl3 MFC set to  0.000000
5/22/2011	2:37:43 AM	SiCl4 MFC set to  0.000000
5/22/2011	2:37:43 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	2:37:43 AM	Tube furnace set to 0
5/22/2011	2:37:45 AM	Helium valve closed
5/22/2011	2:37:45 AM	H2 valve closed
5/22/2011	2:37:45 AM	BCl3 valve closed
5/22/2011	2:37:45 AM	PH3 valve closed
5/22/2011	2:37:45 AM	SiCl4 pre valve closed
5/22/2011	2:37:45 AM	SiCl4 post valve closed
5/22/2011	2:37:45 AM	Main Vac valve closed
5/22/2011	2:37:45 AM	Bypass valve closed
5/22/2011	2:37:45 AM	Bubbler valve closed
5/22/2011	2:37:46 AM	Helium MFC set to  0.000000
5/22/2011	2:37:46 AM	H2 MFC set to  0.000000
5/22/2011	2:37:46 AM	BCl3 MFC set to  0.000000
5/22/2011	2:37:46 AM	PHl3 MFC set to  0.000000
5/22/2011	2:37:46 AM	SiCl4 MFC set to  0.000000
5/22/2011	2:37:46 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	2:37:46 AM	Tube furnace set to 0
5/22/2011	2:37:46 AM	Run finished at 2:37 AM
5/22/2011	2:37:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/22/2011	2:41:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2011	2:41:37 AM	Recipe started at 2:41 AM
5/22/2011	2:41:37 AM	Helium valve closed
5/22/2011	2:41:37 AM	H2 valve closed
5/22/2011	2:41:37 AM	BCl3 valve closed
5/22/2011	2:41:37 AM	PH3 valve closed
5/22/2011	2:41:37 AM	SiCl4 pre valve closed
5/22/2011	2:41:37 AM	SiCl4 post valve closed
5/22/2011	2:41:37 AM	Main Vac valve closed
5/22/2011	2:41:37 AM	Bubbler valve closed
5/22/2011	2:41:37 AM	Bypass valve opened
5/22/2011	2:41:37 AM	Helium MFC set to  0.000000
5/22/2011	2:41:37 AM	H2 MFC set to  0.000000
5/22/2011	2:41:37 AM	BCl3 MFC set to  0.000000
5/22/2011	2:41:37 AM	PHl3 MFC set to  0.000000
5/22/2011	2:41:37 AM	SiCl4 MFC set to  0.000000
5/22/2011	2:41:37 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	2:41:37 AM	Tube furnace set to 0
5/22/2011	2:42:08 AM	Helium valve closed
5/22/2011	2:42:08 AM	H2 valve closed
5/22/2011	2:42:08 AM	BCl3 valve closed
5/22/2011	2:42:08 AM	PH3 valve closed
5/22/2011	2:42:08 AM	SiCl4 pre valve closed
5/22/2011	2:42:08 AM	SiCl4 post valve closed
5/22/2011	2:42:08 AM	Bubbler valve closed
5/22/2011	2:42:08 AM	Main Vac valve opened
5/22/2011	2:42:08 AM	Bypass valve opened
5/22/2011	2:42:08 AM	Helium MFC set to  0.000000
5/22/2011	2:42:08 AM	H2 MFC set to  0.000000
5/22/2011	2:42:08 AM	BCl3 MFC set to  0.000000
5/22/2011	2:42:08 AM	PHl3 MFC set to  0.000000
5/22/2011	2:42:08 AM	SiCl4 MFC set to  0.000000
5/22/2011	2:42:08 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	2:42:08 AM	Tube furnace set to 0
5/22/2011	2:42:09 AM	Run finished at 2:42 AM
5/22/2011	2:42:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2011	2:42:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/22/2011	2:42:42 AM	Recipe started at 2:42 AM
5/22/2011	2:42:42 AM	Helium valve closed
5/22/2011	2:42:42 AM	H2 valve closed
5/22/2011	2:42:42 AM	BCl3 valve closed
5/22/2011	2:42:42 AM	PH3 valve closed
5/22/2011	2:42:42 AM	SiCl4 pre valve closed
5/22/2011	2:42:42 AM	SiCl4 post valve closed
5/22/2011	2:42:42 AM	Main Vac valve closed
5/22/2011	2:42:42 AM	Bypass valve closed
5/22/2011	2:42:42 AM	Bubbler valve closed
5/22/2011	2:42:42 AM	Helium MFC set to  0.000000
5/22/2011	2:42:42 AM	H2 MFC set to  0.000000
5/22/2011	2:42:42 AM	BCl3 MFC set to  0.000000
5/22/2011	2:42:42 AM	PHl3 MFC set to  0.000000
5/22/2011	2:42:42 AM	SiCl4 MFC set to  0.000000
5/22/2011	2:42:42 AM	Bypass solenoid MFC set to  0.000000
5/22/2011	2:42:42 AM	Tube furnace set to 0
5/22/2011	2:42:42 AM	Run finished at 2:42 AM
5/22/2011	2:42:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/22/2011	12:16:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/22/2011	12:16:17 PM	Recipe started at 12:16 PM
5/22/2011	12:16:17 PM	H2 valve closed
5/22/2011	12:16:17 PM	BCl3 valve closed
5/22/2011	12:16:17 PM	PH3 valve closed
5/22/2011	12:16:17 PM	SiCl4 pre valve closed
5/22/2011	12:16:17 PM	SiCl4 post valve closed
5/22/2011	12:16:17 PM	Main Vac valve closed
5/22/2011	12:16:17 PM	Bypass valve closed
5/22/2011	12:16:17 PM	Bubbler valve closed
5/22/2011	12:16:17 PM	Helium valve opened
5/22/2011	12:16:17 PM	Helium MFC set to  500.000000
5/22/2011	12:16:17 PM	H2 MFC set to  0.000000
5/22/2011	12:16:17 PM	BCl3 MFC set to  0.000000
5/22/2011	12:16:17 PM	PHl3 MFC set to  0.000000
5/22/2011	12:16:17 PM	SiCl4 MFC set to  0.000000
5/22/2011	12:16:17 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	12:16:17 PM	Tube furnace set to 0
5/22/2011	12:17:31 PM	Helium valve closed
5/22/2011	12:17:31 PM	H2 valve closed
5/22/2011	12:17:31 PM	BCl3 valve closed
5/22/2011	12:17:31 PM	PH3 valve closed
5/22/2011	12:17:31 PM	SiCl4 pre valve closed
5/22/2011	12:17:31 PM	SiCl4 post valve closed
5/22/2011	12:17:31 PM	Main Vac valve closed
5/22/2011	12:17:31 PM	Bypass valve closed
5/22/2011	12:17:31 PM	Bubbler valve closed
5/22/2011	12:17:31 PM	Helium MFC set to  0.000000
5/22/2011	12:17:31 PM	H2 MFC set to  0.000000
5/22/2011	12:17:31 PM	BCl3 MFC set to  0.000000
5/22/2011	12:17:31 PM	PHl3 MFC set to  0.000000
5/22/2011	12:17:31 PM	SiCl4 MFC set to  0.000000
5/22/2011	12:17:31 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	12:17:31 PM	Tube furnace set to 0
5/22/2011	12:17:31 PM	Run finished at 12:17 PM
5/22/2011	12:17:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/22/2011	12:28:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2011	12:28:30 PM	Recipe started at 12:28 PM
5/22/2011	12:28:30 PM	Helium valve closed
5/22/2011	12:28:30 PM	H2 valve closed
5/22/2011	12:28:30 PM	BCl3 valve closed
5/22/2011	12:28:30 PM	PH3 valve closed
5/22/2011	12:28:30 PM	SiCl4 pre valve closed
5/22/2011	12:28:30 PM	SiCl4 post valve closed
5/22/2011	12:28:30 PM	Main Vac valve closed
5/22/2011	12:28:30 PM	Bubbler valve closed
5/22/2011	12:28:30 PM	Bypass valve opened
5/22/2011	12:28:30 PM	Helium MFC set to  0.000000
5/22/2011	12:28:30 PM	H2 MFC set to  0.000000
5/22/2011	12:28:30 PM	BCl3 MFC set to  0.000000
5/22/2011	12:28:30 PM	PHl3 MFC set to  0.000000
5/22/2011	12:28:30 PM	SiCl4 MFC set to  0.000000
5/22/2011	12:28:30 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	12:28:31 PM	Tube furnace set to 0
5/22/2011	12:29:03 PM	Helium valve closed
5/22/2011	12:29:03 PM	H2 valve closed
5/22/2011	12:29:03 PM	BCl3 valve closed
5/22/2011	12:29:03 PM	PH3 valve closed
5/22/2011	12:29:03 PM	SiCl4 pre valve closed
5/22/2011	12:29:03 PM	SiCl4 post valve closed
5/22/2011	12:29:03 PM	Bubbler valve closed
5/22/2011	12:29:03 PM	Main Vac valve opened
5/22/2011	12:29:03 PM	Bypass valve opened
5/22/2011	12:29:03 PM	Helium MFC set to  0.000000
5/22/2011	12:29:03 PM	H2 MFC set to  0.000000
5/22/2011	12:29:03 PM	BCl3 MFC set to  0.000000
5/22/2011	12:29:03 PM	PHl3 MFC set to  0.000000
5/22/2011	12:29:03 PM	SiCl4 MFC set to  0.000000
5/22/2011	12:29:03 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	12:29:04 PM	Tube furnace set to 0
5/22/2011	12:29:04 PM	Run finished at 12:29 PM
5/22/2011	12:29:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2011	1:53:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/22/2011	1:54:08 PM	Recipe started at 1:54 PM
5/22/2011	1:54:08 PM	Helium valve closed
5/22/2011	1:54:08 PM	H2 valve closed
5/22/2011	1:54:08 PM	BCl3 valve closed
5/22/2011	1:54:08 PM	PH3 valve closed
5/22/2011	1:54:08 PM	SiCl4 pre valve closed
5/22/2011	1:54:08 PM	SiCl4 post valve closed
5/22/2011	1:54:08 PM	Main Vac valve closed
5/22/2011	1:54:08 PM	Bubbler valve closed
5/22/2011	1:54:08 PM	Bypass valve opened
5/22/2011	1:54:08 PM	Helium MFC set to  0.000000
5/22/2011	1:54:08 PM	H2 MFC set to  0.000000
5/22/2011	1:54:08 PM	BCl3 MFC set to  0.000000
5/22/2011	1:54:08 PM	PHl3 MFC set to  0.000000
5/22/2011	1:54:08 PM	SiCl4 MFC set to  0.000000
5/22/2011	1:54:08 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	1:54:08 PM	Tube furnace set to 0
5/22/2011	1:54:09 PM	Helium valve closed
5/22/2011	1:54:09 PM	H2 valve closed
5/22/2011	1:54:09 PM	BCl3 valve closed
5/22/2011	1:54:09 PM	PH3 valve closed
5/22/2011	1:54:09 PM	SiCl4 pre valve closed
5/22/2011	1:54:09 PM	SiCl4 post valve closed
5/22/2011	1:54:09 PM	Bubbler valve closed
5/22/2011	1:54:09 PM	Main Vac valve opened
5/22/2011	1:54:09 PM	Bypass valve opened
5/22/2011	1:54:09 PM	Helium MFC set to  0.000000
5/22/2011	1:54:09 PM	H2 MFC set to  0.000000
5/22/2011	1:54:09 PM	BCl3 MFC set to  0.000000
5/22/2011	1:54:09 PM	PHl3 MFC set to  0.000000
5/22/2011	1:54:09 PM	SiCl4 MFC set to  0.000000
5/22/2011	1:54:09 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	1:54:09 PM	Tube furnace set to 0
5/22/2011	1:55:09 PM	H2 valve closed
5/22/2011	1:55:09 PM	BCl3 valve closed
5/22/2011	1:55:09 PM	PH3 valve closed
5/22/2011	1:55:09 PM	SiCl4 pre valve closed
5/22/2011	1:55:09 PM	SiCl4 post valve closed
5/22/2011	1:55:09 PM	Bubbler valve closed
5/22/2011	1:55:09 PM	Helium valve opened
5/22/2011	1:55:09 PM	Main Vac valve opened
5/22/2011	1:55:09 PM	Bypass valve opened
5/22/2011	1:55:09 PM	Helium MFC set to  100.000000
5/22/2011	1:55:09 PM	H2 MFC set to  0.000000
5/22/2011	1:55:09 PM	BCl3 MFC set to  0.000000
5/22/2011	1:55:09 PM	PHl3 MFC set to  0.000000
5/22/2011	1:55:09 PM	SiCl4 MFC set to  0.000000
5/22/2011	1:55:09 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	1:55:09 PM	Tube furnace set to 0
5/22/2011	1:56:09 PM	Helium valve closed
5/22/2011	1:56:09 PM	H2 valve closed
5/22/2011	1:56:09 PM	BCl3 valve closed
5/22/2011	1:56:09 PM	PH3 valve closed
5/22/2011	1:56:09 PM	SiCl4 pre valve closed
5/22/2011	1:56:09 PM	SiCl4 post valve closed
5/22/2011	1:56:09 PM	Bubbler valve closed
5/22/2011	1:56:09 PM	Main Vac valve opened
5/22/2011	1:56:09 PM	Bypass valve opened
5/22/2011	1:56:09 PM	Helium MFC set to  0.000000
5/22/2011	1:56:09 PM	H2 MFC set to  0.000000
5/22/2011	1:56:09 PM	BCl3 MFC set to  0.000000
5/22/2011	1:56:09 PM	PHl3 MFC set to  0.000000
5/22/2011	1:56:09 PM	SiCl4 MFC set to  0.000000
5/22/2011	1:56:09 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	1:56:09 PM	Tube furnace set to 0
5/22/2011	1:57:09 PM	H2 valve closed
5/22/2011	1:57:09 PM	BCl3 valve closed
5/22/2011	1:57:09 PM	PH3 valve closed
5/22/2011	1:57:09 PM	SiCl4 pre valve closed
5/22/2011	1:57:09 PM	SiCl4 post valve closed
5/22/2011	1:57:09 PM	Bubbler valve closed
5/22/2011	1:57:09 PM	Helium valve opened
5/22/2011	1:57:09 PM	Main Vac valve opened
5/22/2011	1:57:09 PM	Bypass valve opened
5/22/2011	1:57:09 PM	Helium MFC set to  100.000000
5/22/2011	1:57:09 PM	H2 MFC set to  0.000000
5/22/2011	1:57:09 PM	BCl3 MFC set to  0.000000
5/22/2011	1:57:09 PM	PHl3 MFC set to  0.000000
5/22/2011	1:57:09 PM	SiCl4 MFC set to  0.000000
5/22/2011	1:57:09 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	1:57:09 PM	Tube furnace set to 0
5/22/2011	1:58:09 PM	Helium valve closed
5/22/2011	1:58:09 PM	H2 valve closed
5/22/2011	1:58:09 PM	BCl3 valve closed
5/22/2011	1:58:09 PM	PH3 valve closed
5/22/2011	1:58:09 PM	SiCl4 pre valve closed
5/22/2011	1:58:09 PM	SiCl4 post valve closed
5/22/2011	1:58:09 PM	Bubbler valve closed
5/22/2011	1:58:09 PM	Main Vac valve opened
5/22/2011	1:58:09 PM	Bypass valve opened
5/22/2011	1:58:09 PM	Helium MFC set to  0.000000
5/22/2011	1:58:09 PM	H2 MFC set to  0.000000
5/22/2011	1:58:09 PM	BCl3 MFC set to  0.000000
5/22/2011	1:58:09 PM	PHl3 MFC set to  0.000000
5/22/2011	1:58:09 PM	SiCl4 MFC set to  0.000000
5/22/2011	1:58:09 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	1:58:10 PM	Tube furnace set to 0
5/22/2011	1:59:10 PM	H2 valve closed
5/22/2011	1:59:10 PM	BCl3 valve closed
5/22/2011	1:59:10 PM	PH3 valve closed
5/22/2011	1:59:10 PM	SiCl4 pre valve closed
5/22/2011	1:59:10 PM	SiCl4 post valve closed
5/22/2011	1:59:10 PM	Bubbler valve closed
5/22/2011	1:59:10 PM	Helium valve opened
5/22/2011	1:59:10 PM	Main Vac valve opened
5/22/2011	1:59:10 PM	Bypass valve opened
5/22/2011	1:59:10 PM	Helium MFC set to  100.000000
5/22/2011	1:59:10 PM	H2 MFC set to  0.000000
5/22/2011	1:59:10 PM	BCl3 MFC set to  0.000000
5/22/2011	1:59:10 PM	PHl3 MFC set to  0.000000
5/22/2011	1:59:10 PM	SiCl4 MFC set to  0.000000
5/22/2011	1:59:10 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	1:59:10 PM	Tube furnace set to 0
5/22/2011	2:00:10 PM	Helium valve closed
5/22/2011	2:00:10 PM	H2 valve closed
5/22/2011	2:00:10 PM	BCl3 valve closed
5/22/2011	2:00:10 PM	PH3 valve closed
5/22/2011	2:00:10 PM	SiCl4 pre valve closed
5/22/2011	2:00:10 PM	SiCl4 post valve closed
5/22/2011	2:00:10 PM	Bubbler valve closed
5/22/2011	2:00:10 PM	Main Vac valve opened
5/22/2011	2:00:10 PM	Bypass valve opened
5/22/2011	2:00:10 PM	Helium MFC set to  0.000000
5/22/2011	2:00:10 PM	H2 MFC set to  0.000000
5/22/2011	2:00:10 PM	BCl3 MFC set to  0.000000
5/22/2011	2:00:10 PM	PHl3 MFC set to  0.000000
5/22/2011	2:00:10 PM	SiCl4 MFC set to  0.000000
5/22/2011	2:00:10 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	2:00:10 PM	Tube furnace set to 0
5/22/2011	2:01:10 PM	H2 valve closed
5/22/2011	2:01:10 PM	BCl3 valve closed
5/22/2011	2:01:10 PM	PH3 valve closed
5/22/2011	2:01:10 PM	SiCl4 pre valve closed
5/22/2011	2:01:10 PM	SiCl4 post valve closed
5/22/2011	2:01:10 PM	Bubbler valve closed
5/22/2011	2:01:10 PM	Helium valve opened
5/22/2011	2:01:10 PM	Main Vac valve opened
5/22/2011	2:01:10 PM	Bypass valve opened
5/22/2011	2:01:10 PM	Helium MFC set to  100.000000
5/22/2011	2:01:10 PM	H2 MFC set to  0.000000
5/22/2011	2:01:10 PM	BCl3 MFC set to  0.000000
5/22/2011	2:01:10 PM	PHl3 MFC set to  0.000000
5/22/2011	2:01:10 PM	SiCl4 MFC set to  0.000000
5/22/2011	2:01:10 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	2:01:10 PM	Tube furnace set to 0
5/22/2011	2:02:10 PM	Helium valve closed
5/22/2011	2:02:10 PM	H2 valve closed
5/22/2011	2:02:10 PM	BCl3 valve closed
5/22/2011	2:02:10 PM	PH3 valve closed
5/22/2011	2:02:10 PM	SiCl4 pre valve closed
5/22/2011	2:02:10 PM	SiCl4 post valve closed
5/22/2011	2:02:10 PM	Bubbler valve closed
5/22/2011	2:02:10 PM	Main Vac valve opened
5/22/2011	2:02:10 PM	Bypass valve opened
5/22/2011	2:02:10 PM	Helium MFC set to  0.000000
5/22/2011	2:02:10 PM	H2 MFC set to  0.000000
5/22/2011	2:02:10 PM	BCl3 MFC set to  0.000000
5/22/2011	2:02:10 PM	PHl3 MFC set to  0.000000
5/22/2011	2:02:10 PM	SiCl4 MFC set to  0.000000
5/22/2011	2:02:10 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	2:02:10 PM	Tube furnace set to 0
5/22/2011	2:03:10 PM	H2 valve closed
5/22/2011	2:03:10 PM	BCl3 valve closed
5/22/2011	2:03:10 PM	PH3 valve closed
5/22/2011	2:03:10 PM	SiCl4 pre valve closed
5/22/2011	2:03:10 PM	SiCl4 post valve closed
5/22/2011	2:03:10 PM	Bubbler valve closed
5/22/2011	2:03:10 PM	Helium valve opened
5/22/2011	2:03:10 PM	Main Vac valve opened
5/22/2011	2:03:10 PM	Bypass valve opened
5/22/2011	2:03:10 PM	Helium MFC set to  100.000000
5/22/2011	2:03:10 PM	H2 MFC set to  0.000000
5/22/2011	2:03:10 PM	BCl3 MFC set to  0.000000
5/22/2011	2:03:10 PM	PHl3 MFC set to  0.000000
5/22/2011	2:03:10 PM	SiCl4 MFC set to  0.000000
5/22/2011	2:03:10 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	2:03:11 PM	Tube furnace set to 0
5/22/2011	2:04:11 PM	Helium valve closed
5/22/2011	2:04:11 PM	H2 valve closed
5/22/2011	2:04:11 PM	BCl3 valve closed
5/22/2011	2:04:11 PM	PH3 valve closed
5/22/2011	2:04:11 PM	SiCl4 pre valve closed
5/22/2011	2:04:11 PM	SiCl4 post valve closed
5/22/2011	2:04:11 PM	Bubbler valve closed
5/22/2011	2:04:11 PM	Main Vac valve opened
5/22/2011	2:04:11 PM	Bypass valve opened
5/22/2011	2:04:11 PM	Helium MFC set to  0.000000
5/22/2011	2:04:11 PM	H2 MFC set to  0.000000
5/22/2011	2:04:11 PM	BCl3 MFC set to  0.000000
5/22/2011	2:04:11 PM	PHl3 MFC set to  0.000000
5/22/2011	2:04:11 PM	SiCl4 MFC set to  0.000000
5/22/2011	2:04:11 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	2:04:11 PM	Tube furnace set to 0
5/22/2011	2:05:11 PM	H2 valve closed
5/22/2011	2:05:11 PM	BCl3 valve closed
5/22/2011	2:05:11 PM	PH3 valve closed
5/22/2011	2:05:11 PM	SiCl4 pre valve closed
5/22/2011	2:05:11 PM	SiCl4 post valve closed
5/22/2011	2:05:11 PM	Bubbler valve closed
5/22/2011	2:05:11 PM	Helium valve opened
5/22/2011	2:05:11 PM	Main Vac valve opened
5/22/2011	2:05:11 PM	Bypass valve opened
5/22/2011	2:05:11 PM	Helium MFC set to  100.000000
5/22/2011	2:05:11 PM	H2 MFC set to  0.000000
5/22/2011	2:05:11 PM	BCl3 MFC set to  0.000000
5/22/2011	2:05:11 PM	PHl3 MFC set to  0.000000
5/22/2011	2:05:11 PM	SiCl4 MFC set to  0.000000
5/22/2011	2:05:11 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	2:05:11 PM	Tube furnace set to 0
5/22/2011	2:06:11 PM	Helium valve closed
5/22/2011	2:06:11 PM	H2 valve closed
5/22/2011	2:06:11 PM	BCl3 valve closed
5/22/2011	2:06:11 PM	PH3 valve closed
5/22/2011	2:06:11 PM	SiCl4 pre valve closed
5/22/2011	2:06:11 PM	SiCl4 post valve closed
5/22/2011	2:06:11 PM	Bubbler valve closed
5/22/2011	2:06:11 PM	Main Vac valve opened
5/22/2011	2:06:11 PM	Bypass valve opened
5/22/2011	2:06:11 PM	Helium MFC set to  0.000000
5/22/2011	2:06:11 PM	H2 MFC set to  0.000000
5/22/2011	2:06:11 PM	BCl3 MFC set to  0.000000
5/22/2011	2:06:11 PM	PHl3 MFC set to  0.000000
5/22/2011	2:06:11 PM	SiCl4 MFC set to  0.000000
5/22/2011	2:06:11 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	2:06:11 PM	Tube furnace set to 0
5/22/2011	2:07:11 PM	H2 valve closed
5/22/2011	2:07:11 PM	BCl3 valve closed
5/22/2011	2:07:11 PM	PH3 valve closed
5/22/2011	2:07:11 PM	SiCl4 pre valve closed
5/22/2011	2:07:11 PM	SiCl4 post valve closed
5/22/2011	2:07:11 PM	Bubbler valve closed
5/22/2011	2:07:11 PM	Helium valve opened
5/22/2011	2:07:11 PM	Main Vac valve opened
5/22/2011	2:07:11 PM	Bypass valve opened
5/22/2011	2:07:11 PM	Helium MFC set to  100.000000
5/22/2011	2:07:11 PM	H2 MFC set to  0.000000
5/22/2011	2:07:11 PM	BCl3 MFC set to  0.000000
5/22/2011	2:07:11 PM	PHl3 MFC set to  0.000000
5/22/2011	2:07:11 PM	SiCl4 MFC set to  0.000000
5/22/2011	2:07:11 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	2:07:11 PM	Tube furnace set to 0
5/22/2011	2:08:11 PM	Helium valve closed
5/22/2011	2:08:11 PM	H2 valve closed
5/22/2011	2:08:11 PM	BCl3 valve closed
5/22/2011	2:08:11 PM	PH3 valve closed
5/22/2011	2:08:11 PM	SiCl4 pre valve closed
5/22/2011	2:08:11 PM	SiCl4 post valve closed
5/22/2011	2:08:11 PM	Bubbler valve closed
5/22/2011	2:08:11 PM	Main Vac valve opened
5/22/2011	2:08:11 PM	Bypass valve opened
5/22/2011	2:08:11 PM	Helium MFC set to  0.000000
5/22/2011	2:08:11 PM	H2 MFC set to  0.000000
5/22/2011	2:08:11 PM	BCl3 MFC set to  0.000000
5/22/2011	2:08:11 PM	PHl3 MFC set to  0.000000
5/22/2011	2:08:11 PM	SiCl4 MFC set to  0.000000
5/22/2011	2:08:11 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	2:08:12 PM	Tube furnace set to 0
5/22/2011	2:09:12 PM	H2 valve closed
5/22/2011	2:09:12 PM	BCl3 valve closed
5/22/2011	2:09:12 PM	PH3 valve closed
5/22/2011	2:09:12 PM	SiCl4 pre valve closed
5/22/2011	2:09:12 PM	SiCl4 post valve closed
5/22/2011	2:09:12 PM	Bubbler valve closed
5/22/2011	2:09:12 PM	Helium valve opened
5/22/2011	2:09:12 PM	Main Vac valve opened
5/22/2011	2:09:12 PM	Bypass valve opened
5/22/2011	2:09:12 PM	Helium MFC set to  100.000000
5/22/2011	2:09:12 PM	H2 MFC set to  0.000000
5/22/2011	2:09:12 PM	BCl3 MFC set to  0.000000
5/22/2011	2:09:12 PM	PHl3 MFC set to  0.000000
5/22/2011	2:09:12 PM	SiCl4 MFC set to  0.000000
5/22/2011	2:09:12 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	2:09:12 PM	Tube furnace set to 0
5/22/2011	2:10:12 PM	Helium valve closed
5/22/2011	2:10:12 PM	H2 valve closed
5/22/2011	2:10:12 PM	BCl3 valve closed
5/22/2011	2:10:12 PM	PH3 valve closed
5/22/2011	2:10:12 PM	SiCl4 pre valve closed
5/22/2011	2:10:12 PM	SiCl4 post valve closed
5/22/2011	2:10:12 PM	Bubbler valve closed
5/22/2011	2:10:12 PM	Main Vac valve opened
5/22/2011	2:10:12 PM	Bypass valve opened
5/22/2011	2:10:12 PM	Helium MFC set to  0.000000
5/22/2011	2:10:12 PM	H2 MFC set to  0.000000
5/22/2011	2:10:12 PM	BCl3 MFC set to  0.000000
5/22/2011	2:10:12 PM	PHl3 MFC set to  0.000000
5/22/2011	2:10:12 PM	SiCl4 MFC set to  0.000000
5/22/2011	2:10:12 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	2:10:12 PM	Tube furnace set to 0
5/22/2011	2:11:12 PM	H2 valve closed
5/22/2011	2:11:12 PM	BCl3 valve closed
5/22/2011	2:11:12 PM	PH3 valve closed
5/22/2011	2:11:12 PM	SiCl4 pre valve closed
5/22/2011	2:11:12 PM	SiCl4 post valve closed
5/22/2011	2:11:12 PM	Bubbler valve closed
5/22/2011	2:11:12 PM	Helium valve opened
5/22/2011	2:11:12 PM	Main Vac valve opened
5/22/2011	2:11:12 PM	Bypass valve opened
5/22/2011	2:11:12 PM	Helium MFC set to  100.000000
5/22/2011	2:11:12 PM	H2 MFC set to  0.000000
5/22/2011	2:11:12 PM	BCl3 MFC set to  0.000000
5/22/2011	2:11:12 PM	PHl3 MFC set to  0.000000
5/22/2011	2:11:12 PM	SiCl4 MFC set to  0.000000
5/22/2011	2:11:12 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	2:11:12 PM	Tube furnace set to 0
5/22/2011	2:12:12 PM	Helium valve closed
5/22/2011	2:12:12 PM	H2 valve closed
5/22/2011	2:12:12 PM	BCl3 valve closed
5/22/2011	2:12:12 PM	PH3 valve closed
5/22/2011	2:12:12 PM	SiCl4 pre valve closed
5/22/2011	2:12:12 PM	SiCl4 post valve closed
5/22/2011	2:12:12 PM	Bubbler valve closed
5/22/2011	2:12:12 PM	Main Vac valve opened
5/22/2011	2:12:12 PM	Bypass valve opened
5/22/2011	2:12:12 PM	Helium MFC set to  0.000000
5/22/2011	2:12:12 PM	H2 MFC set to  0.000000
5/22/2011	2:12:12 PM	BCl3 MFC set to  0.000000
5/22/2011	2:12:12 PM	PHl3 MFC set to  0.000000
5/22/2011	2:12:12 PM	SiCl4 MFC set to  0.000000
5/22/2011	2:12:12 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	2:12:12 PM	Tube furnace set to 0
5/22/2011	2:13:12 PM	H2 valve closed
5/22/2011	2:13:12 PM	BCl3 valve closed
5/22/2011	2:13:12 PM	PH3 valve closed
5/22/2011	2:13:12 PM	SiCl4 pre valve closed
5/22/2011	2:13:12 PM	SiCl4 post valve closed
5/22/2011	2:13:12 PM	Bubbler valve closed
5/22/2011	2:13:12 PM	Helium valve opened
5/22/2011	2:13:12 PM	Main Vac valve opened
5/22/2011	2:13:12 PM	Bypass valve opened
5/22/2011	2:13:12 PM	Helium MFC set to  100.000000
5/22/2011	2:13:12 PM	H2 MFC set to  0.000000
5/22/2011	2:13:12 PM	BCl3 MFC set to  0.000000
5/22/2011	2:13:12 PM	PHl3 MFC set to  0.000000
5/22/2011	2:13:12 PM	SiCl4 MFC set to  0.000000
5/22/2011	2:13:12 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	2:13:13 PM	Tube furnace set to 0
5/22/2011	2:14:13 PM	Helium valve closed
5/22/2011	2:14:13 PM	H2 valve closed
5/22/2011	2:14:13 PM	BCl3 valve closed
5/22/2011	2:14:13 PM	PH3 valve closed
5/22/2011	2:14:13 PM	SiCl4 pre valve closed
5/22/2011	2:14:13 PM	SiCl4 post valve closed
5/22/2011	2:14:13 PM	Bubbler valve closed
5/22/2011	2:14:13 PM	Main Vac valve opened
5/22/2011	2:14:13 PM	Bypass valve opened
5/22/2011	2:14:13 PM	Helium MFC set to  0.000000
5/22/2011	2:14:13 PM	H2 MFC set to  0.000000
5/22/2011	2:14:13 PM	BCl3 MFC set to  0.000000
5/22/2011	2:14:13 PM	PHl3 MFC set to  0.000000
5/22/2011	2:14:13 PM	SiCl4 MFC set to  0.000000
5/22/2011	2:14:13 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	2:14:13 PM	Tube furnace set to 0
5/22/2011	2:14:14 PM	Run finished at 2:14 PM
5/22/2011	2:14:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/22/2011	2:14:56 PM	Recipe started at 2:14 PM
5/22/2011	2:14:56 PM	Helium valve closed
5/22/2011	2:14:56 PM	BCl3 valve closed
5/22/2011	2:14:56 PM	PH3 valve closed
5/22/2011	2:14:56 PM	SiCl4 pre valve closed
5/22/2011	2:14:56 PM	SiCl4 post valve closed
5/22/2011	2:14:56 PM	Main Vac valve closed
5/22/2011	2:14:56 PM	Bypass valve closed
5/22/2011	2:14:56 PM	Bubbler valve closed
5/22/2011	2:14:56 PM	H2 valve opened
5/22/2011	2:14:56 PM	Helium MFC set to  0.000000
5/22/2011	2:14:56 PM	H2 MFC set to  500.000000
5/22/2011	2:14:56 PM	BCl3 MFC set to  0.000000
5/22/2011	2:14:56 PM	PHl3 MFC set to  0.000000
5/22/2011	2:14:56 PM	SiCl4 MFC set to  0.000000
5/22/2011	2:14:56 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	2:14:56 PM	Tube furnace set to 0
5/22/2011	2:16:19 PM	Helium valve closed
5/22/2011	2:16:19 PM	BCl3 valve closed
5/22/2011	2:16:19 PM	PH3 valve closed
5/22/2011	2:16:19 PM	SiCl4 pre valve closed
5/22/2011	2:16:19 PM	SiCl4 post valve closed
5/22/2011	2:16:19 PM	Main Vac valve closed
5/22/2011	2:16:19 PM	Bypass valve closed
5/22/2011	2:16:19 PM	H2 valve opened
5/22/2011	2:16:19 PM	Bubbler valve opened
5/22/2011	2:16:19 PM	Helium MFC set to  0.000000
5/22/2011	2:16:19 PM	H2 MFC set to  500.000000
5/22/2011	2:16:19 PM	BCl3 MFC set to  0.000000
5/22/2011	2:16:19 PM	PHl3 MFC set to  0.000000
5/22/2011	2:16:19 PM	SiCl4 MFC set to  0.000000
5/22/2011	2:16:19 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	2:16:20 PM	Tube furnace set to 250
5/22/2011	2:26:20 PM	Helium valve closed
5/22/2011	2:26:20 PM	BCl3 valve closed
5/22/2011	2:26:20 PM	PH3 valve closed
5/22/2011	2:26:20 PM	SiCl4 pre valve closed
5/22/2011	2:26:20 PM	SiCl4 post valve closed
5/22/2011	2:26:20 PM	Main Vac valve closed
5/22/2011	2:26:20 PM	Bypass valve closed
5/22/2011	2:26:20 PM	H2 valve opened
5/22/2011	2:26:20 PM	Bubbler valve opened
5/22/2011	2:26:20 PM	Helium MFC set to  0.000000
5/22/2011	2:26:20 PM	H2 MFC set to  500.000000
5/22/2011	2:26:20 PM	BCl3 MFC set to  0.000000
5/22/2011	2:26:20 PM	PHl3 MFC set to  0.000000
5/22/2011	2:26:20 PM	SiCl4 MFC set to  0.000000
5/22/2011	2:26:20 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	2:26:20 PM	Tube furnace set to 1000
5/22/2011	2:46:20 PM	Helium valve closed
5/22/2011	2:46:20 PM	BCl3 valve closed
5/22/2011	2:46:20 PM	Main Vac valve closed
5/22/2011	2:46:20 PM	Bypass valve closed
5/22/2011	2:46:20 PM	H2 valve opened
5/22/2011	2:46:20 PM	PH3 valve opened
5/22/2011	2:46:20 PM	SiCl4 pre valve opened
5/22/2011	2:46:20 PM	SiCl4 post valve opened
5/22/2011	2:46:20 PM	Bubbler valve opened
5/22/2011	2:46:20 PM	Helium MFC set to  0.000000
5/22/2011	2:46:20 PM	H2 MFC set to  450.000000
5/22/2011	2:46:20 PM	BCl3 MFC set to  0.000000
5/22/2011	2:46:20 PM	PHl3 MFC set to  1.000000
5/22/2011	2:46:20 PM	SiCl4 MFC set to  100.000000
5/22/2011	2:46:20 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	2:46:20 PM	Tube furnace set to 1000
5/22/2011	2:47:50 PM	Helium valve closed
5/22/2011	2:47:50 PM	BCl3 valve closed
5/22/2011	2:47:50 PM	Main Vac valve closed
5/22/2011	2:47:50 PM	Bypass valve closed
5/22/2011	2:47:50 PM	H2 valve opened
5/22/2011	2:47:50 PM	PH3 valve opened
5/22/2011	2:47:50 PM	SiCl4 pre valve opened
5/22/2011	2:47:50 PM	SiCl4 post valve opened
5/22/2011	2:47:50 PM	Bubbler valve opened
5/22/2011	2:47:50 PM	Helium MFC set to  0.000000
5/22/2011	2:47:50 PM	H2 MFC set to  500.000000
5/22/2011	2:47:50 PM	BCl3 MFC set to  0.000000
5/22/2011	2:47:50 PM	PHl3 MFC set to  1.000000
5/22/2011	2:47:50 PM	SiCl4 MFC set to  50.000000
5/22/2011	2:47:50 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	2:47:50 PM	Tube furnace set to 1000
5/22/2011	3:03:50 PM	H2 valve closed
5/22/2011	3:03:50 PM	BCl3 valve closed
5/22/2011	3:03:50 PM	PH3 valve closed
5/22/2011	3:03:50 PM	SiCl4 pre valve closed
5/22/2011	3:03:50 PM	SiCl4 post valve closed
5/22/2011	3:03:50 PM	Main Vac valve closed
5/22/2011	3:03:50 PM	Bypass valve closed
5/22/2011	3:03:50 PM	Helium valve opened
5/22/2011	3:03:50 PM	Bubbler valve opened
5/22/2011	3:03:50 PM	Helium MFC set to  500.000000
5/22/2011	3:03:50 PM	H2 MFC set to  0.000000
5/22/2011	3:03:50 PM	BCl3 MFC set to  0.000000
5/22/2011	3:03:50 PM	PHl3 MFC set to  0.000000
5/22/2011	3:03:50 PM	SiCl4 MFC set to  0.000000
5/22/2011	3:03:50 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	3:03:50 PM	Tube furnace set to 0
5/22/2011	3:23:50 PM	Helium valve closed
5/22/2011	3:23:50 PM	H2 valve closed
5/22/2011	3:23:50 PM	BCl3 valve closed
5/22/2011	3:23:50 PM	PH3 valve closed
5/22/2011	3:23:50 PM	SiCl4 pre valve closed
5/22/2011	3:23:50 PM	SiCl4 post valve closed
5/22/2011	3:23:50 PM	Main Vac valve closed
5/22/2011	3:23:50 PM	Bypass valve closed
5/22/2011	3:23:50 PM	Bubbler valve closed
5/22/2011	3:23:50 PM	Helium MFC set to  0.000000
5/22/2011	3:23:50 PM	H2 MFC set to  0.000000
5/22/2011	3:23:50 PM	BCl3 MFC set to  0.000000
5/22/2011	3:23:50 PM	PHl3 MFC set to  0.000000
5/22/2011	3:23:50 PM	SiCl4 MFC set to  0.000000
5/22/2011	3:23:50 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	3:23:50 PM	Tube furnace set to 0
5/22/2011	3:23:51 PM	Run finished at 3:23 PM
5/22/2011	3:41:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/22/2011	3:41:09 PM	Recipe started at 3:41 PM
5/22/2011	3:41:09 PM	H2 valve closed
5/22/2011	3:41:09 PM	BCl3 valve closed
5/22/2011	3:41:09 PM	PH3 valve closed
5/22/2011	3:41:09 PM	SiCl4 pre valve closed
5/22/2011	3:41:09 PM	SiCl4 post valve closed
5/22/2011	3:41:09 PM	Main Vac valve closed
5/22/2011	3:41:09 PM	Bypass valve closed
5/22/2011	3:41:09 PM	Bubbler valve closed
5/22/2011	3:41:09 PM	Helium valve opened
5/22/2011	3:41:09 PM	Helium MFC set to  500.000000
5/22/2011	3:41:09 PM	H2 MFC set to  0.000000
5/22/2011	3:41:09 PM	BCl3 MFC set to  0.000000
5/22/2011	3:41:09 PM	PHl3 MFC set to  0.000000
5/22/2011	3:41:09 PM	SiCl4 MFC set to  0.000000
5/22/2011	3:41:09 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	3:41:09 PM	Tube furnace set to 0
5/22/2011	3:41:14 PM	Helium valve closed
5/22/2011	3:41:14 PM	H2 valve closed
5/22/2011	3:41:14 PM	BCl3 valve closed
5/22/2011	3:41:14 PM	PH3 valve closed
5/22/2011	3:41:14 PM	SiCl4 pre valve closed
5/22/2011	3:41:14 PM	SiCl4 post valve closed
5/22/2011	3:41:14 PM	Main Vac valve closed
5/22/2011	3:41:14 PM	Bypass valve closed
5/22/2011	3:41:14 PM	Bubbler valve closed
5/22/2011	3:41:14 PM	Helium MFC set to  0.000000
5/22/2011	3:41:14 PM	H2 MFC set to  0.000000
5/22/2011	3:41:14 PM	BCl3 MFC set to  0.000000
5/22/2011	3:41:14 PM	PHl3 MFC set to  0.000000
5/22/2011	3:41:14 PM	SiCl4 MFC set to  0.000000
5/22/2011	3:41:14 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	3:41:15 PM	Tube furnace set to 0
5/22/2011	3:41:15 PM	Run finished at 3:41 PM
5/22/2011	3:41:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/22/2011	3:45:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2011	3:45:38 PM	Recipe started at 3:45 PM
5/22/2011	3:45:38 PM	Helium valve closed
5/22/2011	3:45:38 PM	H2 valve closed
5/22/2011	3:45:38 PM	BCl3 valve closed
5/22/2011	3:45:38 PM	PH3 valve closed
5/22/2011	3:45:38 PM	SiCl4 pre valve closed
5/22/2011	3:45:38 PM	SiCl4 post valve closed
5/22/2011	3:45:38 PM	Main Vac valve closed
5/22/2011	3:45:38 PM	Bubbler valve closed
5/22/2011	3:45:38 PM	Bypass valve opened
5/22/2011	3:45:38 PM	Helium MFC set to  0.000000
5/22/2011	3:45:38 PM	H2 MFC set to  0.000000
5/22/2011	3:45:38 PM	BCl3 MFC set to  0.000000
5/22/2011	3:45:38 PM	PHl3 MFC set to  0.000000
5/22/2011	3:45:38 PM	SiCl4 MFC set to  0.000000
5/22/2011	3:45:38 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	3:45:38 PM	Tube furnace set to 0
5/22/2011	3:46:09 PM	Helium valve closed
5/22/2011	3:46:09 PM	H2 valve closed
5/22/2011	3:46:09 PM	BCl3 valve closed
5/22/2011	3:46:09 PM	PH3 valve closed
5/22/2011	3:46:09 PM	SiCl4 pre valve closed
5/22/2011	3:46:09 PM	SiCl4 post valve closed
5/22/2011	3:46:09 PM	Bubbler valve closed
5/22/2011	3:46:09 PM	Main Vac valve opened
5/22/2011	3:46:09 PM	Bypass valve opened
5/22/2011	3:46:09 PM	Helium MFC set to  0.000000
5/22/2011	3:46:09 PM	H2 MFC set to  0.000000
5/22/2011	3:46:09 PM	BCl3 MFC set to  0.000000
5/22/2011	3:46:09 PM	PHl3 MFC set to  0.000000
5/22/2011	3:46:09 PM	SiCl4 MFC set to  0.000000
5/22/2011	3:46:09 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	3:46:09 PM	Tube furnace set to 0
5/22/2011	3:46:09 PM	Run finished at 3:46 PM
5/22/2011	3:46:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2011	5:05:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/22/2011	5:05:20 PM	Recipe started at 5:05 PM
5/22/2011	5:05:20 PM	Helium valve closed
5/22/2011	5:05:20 PM	H2 valve closed
5/22/2011	5:05:20 PM	BCl3 valve closed
5/22/2011	5:05:20 PM	PH3 valve closed
5/22/2011	5:05:20 PM	SiCl4 pre valve closed
5/22/2011	5:05:20 PM	SiCl4 post valve closed
5/22/2011	5:05:20 PM	Main Vac valve closed
5/22/2011	5:05:20 PM	Bubbler valve closed
5/22/2011	5:05:20 PM	Bypass valve opened
5/22/2011	5:05:20 PM	Helium MFC set to  0.000000
5/22/2011	5:05:20 PM	H2 MFC set to  0.000000
5/22/2011	5:05:20 PM	BCl3 MFC set to  0.000000
5/22/2011	5:05:20 PM	PHl3 MFC set to  0.000000
5/22/2011	5:05:20 PM	SiCl4 MFC set to  0.000000
5/22/2011	5:05:20 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	5:05:20 PM	Tube furnace set to 0
5/22/2011	5:05:21 PM	Helium valve closed
5/22/2011	5:05:21 PM	H2 valve closed
5/22/2011	5:05:21 PM	BCl3 valve closed
5/22/2011	5:05:21 PM	PH3 valve closed
5/22/2011	5:05:21 PM	SiCl4 pre valve closed
5/22/2011	5:05:21 PM	SiCl4 post valve closed
5/22/2011	5:05:21 PM	Bubbler valve closed
5/22/2011	5:05:21 PM	Main Vac valve opened
5/22/2011	5:05:21 PM	Bypass valve opened
5/22/2011	5:05:21 PM	Helium MFC set to  0.000000
5/22/2011	5:05:21 PM	H2 MFC set to  0.000000
5/22/2011	5:05:21 PM	BCl3 MFC set to  0.000000
5/22/2011	5:05:21 PM	PHl3 MFC set to  0.000000
5/22/2011	5:05:21 PM	SiCl4 MFC set to  0.000000
5/22/2011	5:05:21 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	5:05:21 PM	Tube furnace set to 0
5/22/2011	5:06:21 PM	H2 valve closed
5/22/2011	5:06:21 PM	BCl3 valve closed
5/22/2011	5:06:21 PM	PH3 valve closed
5/22/2011	5:06:21 PM	SiCl4 pre valve closed
5/22/2011	5:06:21 PM	SiCl4 post valve closed
5/22/2011	5:06:21 PM	Bubbler valve closed
5/22/2011	5:06:21 PM	Helium valve opened
5/22/2011	5:06:21 PM	Main Vac valve opened
5/22/2011	5:06:21 PM	Bypass valve opened
5/22/2011	5:06:21 PM	Helium MFC set to  100.000000
5/22/2011	5:06:21 PM	H2 MFC set to  0.000000
5/22/2011	5:06:21 PM	BCl3 MFC set to  0.000000
5/22/2011	5:06:21 PM	PHl3 MFC set to  0.000000
5/22/2011	5:06:21 PM	SiCl4 MFC set to  0.000000
5/22/2011	5:06:21 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	5:06:21 PM	Tube furnace set to 0
5/22/2011	5:07:21 PM	Helium valve closed
5/22/2011	5:07:21 PM	H2 valve closed
5/22/2011	5:07:21 PM	BCl3 valve closed
5/22/2011	5:07:21 PM	PH3 valve closed
5/22/2011	5:07:21 PM	SiCl4 pre valve closed
5/22/2011	5:07:21 PM	SiCl4 post valve closed
5/22/2011	5:07:21 PM	Bubbler valve closed
5/22/2011	5:07:21 PM	Main Vac valve opened
5/22/2011	5:07:21 PM	Bypass valve opened
5/22/2011	5:07:21 PM	Helium MFC set to  0.000000
5/22/2011	5:07:21 PM	H2 MFC set to  0.000000
5/22/2011	5:07:21 PM	BCl3 MFC set to  0.000000
5/22/2011	5:07:21 PM	PHl3 MFC set to  0.000000
5/22/2011	5:07:21 PM	SiCl4 MFC set to  0.000000
5/22/2011	5:07:21 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	5:07:21 PM	Tube furnace set to 0
5/22/2011	5:08:21 PM	H2 valve closed
5/22/2011	5:08:21 PM	BCl3 valve closed
5/22/2011	5:08:21 PM	PH3 valve closed
5/22/2011	5:08:21 PM	SiCl4 pre valve closed
5/22/2011	5:08:21 PM	SiCl4 post valve closed
5/22/2011	5:08:21 PM	Bubbler valve closed
5/22/2011	5:08:21 PM	Helium valve opened
5/22/2011	5:08:21 PM	Main Vac valve opened
5/22/2011	5:08:21 PM	Bypass valve opened
5/22/2011	5:08:21 PM	Helium MFC set to  100.000000
5/22/2011	5:08:21 PM	H2 MFC set to  0.000000
5/22/2011	5:08:21 PM	BCl3 MFC set to  0.000000
5/22/2011	5:08:21 PM	PHl3 MFC set to  0.000000
5/22/2011	5:08:21 PM	SiCl4 MFC set to  0.000000
5/22/2011	5:08:21 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	5:08:21 PM	Tube furnace set to 0
5/22/2011	5:09:22 PM	Helium valve closed
5/22/2011	5:09:22 PM	H2 valve closed
5/22/2011	5:09:22 PM	BCl3 valve closed
5/22/2011	5:09:22 PM	PH3 valve closed
5/22/2011	5:09:22 PM	SiCl4 pre valve closed
5/22/2011	5:09:22 PM	SiCl4 post valve closed
5/22/2011	5:09:22 PM	Bubbler valve closed
5/22/2011	5:09:22 PM	Main Vac valve opened
5/22/2011	5:09:22 PM	Bypass valve opened
5/22/2011	5:09:22 PM	Helium MFC set to  0.000000
5/22/2011	5:09:22 PM	H2 MFC set to  0.000000
5/22/2011	5:09:22 PM	BCl3 MFC set to  0.000000
5/22/2011	5:09:22 PM	PHl3 MFC set to  0.000000
5/22/2011	5:09:22 PM	SiCl4 MFC set to  0.000000
5/22/2011	5:09:22 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	5:09:22 PM	Tube furnace set to 0
5/22/2011	5:10:22 PM	H2 valve closed
5/22/2011	5:10:22 PM	BCl3 valve closed
5/22/2011	5:10:22 PM	PH3 valve closed
5/22/2011	5:10:22 PM	SiCl4 pre valve closed
5/22/2011	5:10:22 PM	SiCl4 post valve closed
5/22/2011	5:10:22 PM	Bubbler valve closed
5/22/2011	5:10:22 PM	Helium valve opened
5/22/2011	5:10:22 PM	Main Vac valve opened
5/22/2011	5:10:22 PM	Bypass valve opened
5/22/2011	5:10:22 PM	Helium MFC set to  100.000000
5/22/2011	5:10:22 PM	H2 MFC set to  0.000000
5/22/2011	5:10:22 PM	BCl3 MFC set to  0.000000
5/22/2011	5:10:22 PM	PHl3 MFC set to  0.000000
5/22/2011	5:10:22 PM	SiCl4 MFC set to  0.000000
5/22/2011	5:10:22 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	5:10:22 PM	Tube furnace set to 0
5/22/2011	5:11:22 PM	Helium valve closed
5/22/2011	5:11:22 PM	H2 valve closed
5/22/2011	5:11:22 PM	BCl3 valve closed
5/22/2011	5:11:22 PM	PH3 valve closed
5/22/2011	5:11:22 PM	SiCl4 pre valve closed
5/22/2011	5:11:22 PM	SiCl4 post valve closed
5/22/2011	5:11:22 PM	Bubbler valve closed
5/22/2011	5:11:22 PM	Main Vac valve opened
5/22/2011	5:11:22 PM	Bypass valve opened
5/22/2011	5:11:22 PM	Helium MFC set to  0.000000
5/22/2011	5:11:22 PM	H2 MFC set to  0.000000
5/22/2011	5:11:22 PM	BCl3 MFC set to  0.000000
5/22/2011	5:11:22 PM	PHl3 MFC set to  0.000000
5/22/2011	5:11:22 PM	SiCl4 MFC set to  0.000000
5/22/2011	5:11:22 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	5:11:22 PM	Tube furnace set to 0
5/22/2011	5:12:22 PM	H2 valve closed
5/22/2011	5:12:22 PM	BCl3 valve closed
5/22/2011	5:12:22 PM	PH3 valve closed
5/22/2011	5:12:22 PM	SiCl4 pre valve closed
5/22/2011	5:12:22 PM	SiCl4 post valve closed
5/22/2011	5:12:22 PM	Bubbler valve closed
5/22/2011	5:12:22 PM	Helium valve opened
5/22/2011	5:12:22 PM	Main Vac valve opened
5/22/2011	5:12:22 PM	Bypass valve opened
5/22/2011	5:12:22 PM	Helium MFC set to  100.000000
5/22/2011	5:12:22 PM	H2 MFC set to  0.000000
5/22/2011	5:12:22 PM	BCl3 MFC set to  0.000000
5/22/2011	5:12:22 PM	PHl3 MFC set to  0.000000
5/22/2011	5:12:22 PM	SiCl4 MFC set to  0.000000
5/22/2011	5:12:22 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	5:12:22 PM	Tube furnace set to 0
5/22/2011	5:13:22 PM	Helium valve closed
5/22/2011	5:13:22 PM	H2 valve closed
5/22/2011	5:13:22 PM	BCl3 valve closed
5/22/2011	5:13:22 PM	PH3 valve closed
5/22/2011	5:13:22 PM	SiCl4 pre valve closed
5/22/2011	5:13:22 PM	SiCl4 post valve closed
5/22/2011	5:13:22 PM	Bubbler valve closed
5/22/2011	5:13:22 PM	Main Vac valve opened
5/22/2011	5:13:22 PM	Bypass valve opened
5/22/2011	5:13:22 PM	Helium MFC set to  0.000000
5/22/2011	5:13:22 PM	H2 MFC set to  0.000000
5/22/2011	5:13:22 PM	BCl3 MFC set to  0.000000
5/22/2011	5:13:22 PM	PHl3 MFC set to  0.000000
5/22/2011	5:13:22 PM	SiCl4 MFC set to  0.000000
5/22/2011	5:13:22 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	5:13:23 PM	Tube furnace set to 0
5/22/2011	5:14:23 PM	H2 valve closed
5/22/2011	5:14:23 PM	BCl3 valve closed
5/22/2011	5:14:23 PM	PH3 valve closed
5/22/2011	5:14:23 PM	SiCl4 pre valve closed
5/22/2011	5:14:23 PM	SiCl4 post valve closed
5/22/2011	5:14:23 PM	Bubbler valve closed
5/22/2011	5:14:23 PM	Helium valve opened
5/22/2011	5:14:23 PM	Main Vac valve opened
5/22/2011	5:14:23 PM	Bypass valve opened
5/22/2011	5:14:23 PM	Helium MFC set to  100.000000
5/22/2011	5:14:23 PM	H2 MFC set to  0.000000
5/22/2011	5:14:23 PM	BCl3 MFC set to  0.000000
5/22/2011	5:14:23 PM	PHl3 MFC set to  0.000000
5/22/2011	5:14:23 PM	SiCl4 MFC set to  0.000000
5/22/2011	5:14:23 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	5:14:23 PM	Tube furnace set to 0
5/22/2011	5:15:23 PM	Helium valve closed
5/22/2011	5:15:23 PM	H2 valve closed
5/22/2011	5:15:23 PM	BCl3 valve closed
5/22/2011	5:15:23 PM	PH3 valve closed
5/22/2011	5:15:23 PM	SiCl4 pre valve closed
5/22/2011	5:15:23 PM	SiCl4 post valve closed
5/22/2011	5:15:23 PM	Bubbler valve closed
5/22/2011	5:15:23 PM	Main Vac valve opened
5/22/2011	5:15:23 PM	Bypass valve opened
5/22/2011	5:15:23 PM	Helium MFC set to  0.000000
5/22/2011	5:15:23 PM	H2 MFC set to  0.000000
5/22/2011	5:15:23 PM	BCl3 MFC set to  0.000000
5/22/2011	5:15:23 PM	PHl3 MFC set to  0.000000
5/22/2011	5:15:23 PM	SiCl4 MFC set to  0.000000
5/22/2011	5:15:23 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	5:15:23 PM	Tube furnace set to 0
5/22/2011	5:16:23 PM	H2 valve closed
5/22/2011	5:16:23 PM	BCl3 valve closed
5/22/2011	5:16:23 PM	PH3 valve closed
5/22/2011	5:16:23 PM	SiCl4 pre valve closed
5/22/2011	5:16:23 PM	SiCl4 post valve closed
5/22/2011	5:16:23 PM	Bubbler valve closed
5/22/2011	5:16:23 PM	Helium valve opened
5/22/2011	5:16:23 PM	Main Vac valve opened
5/22/2011	5:16:23 PM	Bypass valve opened
5/22/2011	5:16:23 PM	Helium MFC set to  100.000000
5/22/2011	5:16:23 PM	H2 MFC set to  0.000000
5/22/2011	5:16:23 PM	BCl3 MFC set to  0.000000
5/22/2011	5:16:23 PM	PHl3 MFC set to  0.000000
5/22/2011	5:16:23 PM	SiCl4 MFC set to  0.000000
5/22/2011	5:16:23 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	5:16:23 PM	Tube furnace set to 0
5/22/2011	5:17:23 PM	Helium valve closed
5/22/2011	5:17:23 PM	H2 valve closed
5/22/2011	5:17:23 PM	BCl3 valve closed
5/22/2011	5:17:23 PM	PH3 valve closed
5/22/2011	5:17:23 PM	SiCl4 pre valve closed
5/22/2011	5:17:23 PM	SiCl4 post valve closed
5/22/2011	5:17:23 PM	Bubbler valve closed
5/22/2011	5:17:23 PM	Main Vac valve opened
5/22/2011	5:17:23 PM	Bypass valve opened
5/22/2011	5:17:23 PM	Helium MFC set to  0.000000
5/22/2011	5:17:23 PM	H2 MFC set to  0.000000
5/22/2011	5:17:23 PM	BCl3 MFC set to  0.000000
5/22/2011	5:17:23 PM	PHl3 MFC set to  0.000000
5/22/2011	5:17:23 PM	SiCl4 MFC set to  0.000000
5/22/2011	5:17:23 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	5:17:23 PM	Tube furnace set to 0
5/22/2011	5:18:23 PM	H2 valve closed
5/22/2011	5:18:23 PM	BCl3 valve closed
5/22/2011	5:18:23 PM	PH3 valve closed
5/22/2011	5:18:23 PM	SiCl4 pre valve closed
5/22/2011	5:18:23 PM	SiCl4 post valve closed
5/22/2011	5:18:23 PM	Bubbler valve closed
5/22/2011	5:18:23 PM	Helium valve opened
5/22/2011	5:18:23 PM	Main Vac valve opened
5/22/2011	5:18:23 PM	Bypass valve opened
5/22/2011	5:18:23 PM	Helium MFC set to  100.000000
5/22/2011	5:18:23 PM	H2 MFC set to  0.000000
5/22/2011	5:18:23 PM	BCl3 MFC set to  0.000000
5/22/2011	5:18:23 PM	PHl3 MFC set to  0.000000
5/22/2011	5:18:23 PM	SiCl4 MFC set to  0.000000
5/22/2011	5:18:23 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	5:18:24 PM	Tube furnace set to 0
5/22/2011	5:19:24 PM	Helium valve closed
5/22/2011	5:19:24 PM	H2 valve closed
5/22/2011	5:19:24 PM	BCl3 valve closed
5/22/2011	5:19:24 PM	PH3 valve closed
5/22/2011	5:19:24 PM	SiCl4 pre valve closed
5/22/2011	5:19:24 PM	SiCl4 post valve closed
5/22/2011	5:19:24 PM	Bubbler valve closed
5/22/2011	5:19:24 PM	Main Vac valve opened
5/22/2011	5:19:24 PM	Bypass valve opened
5/22/2011	5:19:24 PM	Helium MFC set to  0.000000
5/22/2011	5:19:24 PM	H2 MFC set to  0.000000
5/22/2011	5:19:24 PM	BCl3 MFC set to  0.000000
5/22/2011	5:19:24 PM	PHl3 MFC set to  0.000000
5/22/2011	5:19:24 PM	SiCl4 MFC set to  0.000000
5/22/2011	5:19:24 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	5:19:24 PM	Tube furnace set to 0
5/22/2011	5:20:24 PM	H2 valve closed
5/22/2011	5:20:24 PM	BCl3 valve closed
5/22/2011	5:20:24 PM	PH3 valve closed
5/22/2011	5:20:24 PM	SiCl4 pre valve closed
5/22/2011	5:20:24 PM	SiCl4 post valve closed
5/22/2011	5:20:24 PM	Bubbler valve closed
5/22/2011	5:20:24 PM	Helium valve opened
5/22/2011	5:20:24 PM	Main Vac valve opened
5/22/2011	5:20:24 PM	Bypass valve opened
5/22/2011	5:20:24 PM	Helium MFC set to  100.000000
5/22/2011	5:20:24 PM	H2 MFC set to  0.000000
5/22/2011	5:20:24 PM	BCl3 MFC set to  0.000000
5/22/2011	5:20:24 PM	PHl3 MFC set to  0.000000
5/22/2011	5:20:24 PM	SiCl4 MFC set to  0.000000
5/22/2011	5:20:24 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	5:20:24 PM	Tube furnace set to 0
5/22/2011	5:21:24 PM	Helium valve closed
5/22/2011	5:21:24 PM	H2 valve closed
5/22/2011	5:21:24 PM	BCl3 valve closed
5/22/2011	5:21:24 PM	PH3 valve closed
5/22/2011	5:21:24 PM	SiCl4 pre valve closed
5/22/2011	5:21:24 PM	SiCl4 post valve closed
5/22/2011	5:21:24 PM	Bubbler valve closed
5/22/2011	5:21:24 PM	Main Vac valve opened
5/22/2011	5:21:24 PM	Bypass valve opened
5/22/2011	5:21:24 PM	Helium MFC set to  0.000000
5/22/2011	5:21:24 PM	H2 MFC set to  0.000000
5/22/2011	5:21:24 PM	BCl3 MFC set to  0.000000
5/22/2011	5:21:24 PM	PHl3 MFC set to  0.000000
5/22/2011	5:21:24 PM	SiCl4 MFC set to  0.000000
5/22/2011	5:21:24 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	5:21:24 PM	Tube furnace set to 0
5/22/2011	5:22:24 PM	H2 valve closed
5/22/2011	5:22:24 PM	BCl3 valve closed
5/22/2011	5:22:24 PM	PH3 valve closed
5/22/2011	5:22:24 PM	SiCl4 pre valve closed
5/22/2011	5:22:24 PM	SiCl4 post valve closed
5/22/2011	5:22:24 PM	Bubbler valve closed
5/22/2011	5:22:24 PM	Helium valve opened
5/22/2011	5:22:24 PM	Main Vac valve opened
5/22/2011	5:22:24 PM	Bypass valve opened
5/22/2011	5:22:24 PM	Helium MFC set to  100.000000
5/22/2011	5:22:24 PM	H2 MFC set to  0.000000
5/22/2011	5:22:24 PM	BCl3 MFC set to  0.000000
5/22/2011	5:22:24 PM	PHl3 MFC set to  0.000000
5/22/2011	5:22:24 PM	SiCl4 MFC set to  0.000000
5/22/2011	5:22:24 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	5:22:24 PM	Tube furnace set to 0
5/22/2011	5:23:24 PM	Helium valve closed
5/22/2011	5:23:24 PM	H2 valve closed
5/22/2011	5:23:24 PM	BCl3 valve closed
5/22/2011	5:23:24 PM	PH3 valve closed
5/22/2011	5:23:24 PM	SiCl4 pre valve closed
5/22/2011	5:23:24 PM	SiCl4 post valve closed
5/22/2011	5:23:24 PM	Bubbler valve closed
5/22/2011	5:23:24 PM	Main Vac valve opened
5/22/2011	5:23:24 PM	Bypass valve opened
5/22/2011	5:23:24 PM	Helium MFC set to  0.000000
5/22/2011	5:23:24 PM	H2 MFC set to  0.000000
5/22/2011	5:23:24 PM	BCl3 MFC set to  0.000000
5/22/2011	5:23:24 PM	PHl3 MFC set to  0.000000
5/22/2011	5:23:24 PM	SiCl4 MFC set to  0.000000
5/22/2011	5:23:24 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	5:23:25 PM	Tube furnace set to 0
5/22/2011	5:24:25 PM	H2 valve closed
5/22/2011	5:24:25 PM	BCl3 valve closed
5/22/2011	5:24:25 PM	PH3 valve closed
5/22/2011	5:24:25 PM	SiCl4 pre valve closed
5/22/2011	5:24:25 PM	SiCl4 post valve closed
5/22/2011	5:24:25 PM	Bubbler valve closed
5/22/2011	5:24:25 PM	Helium valve opened
5/22/2011	5:24:25 PM	Main Vac valve opened
5/22/2011	5:24:25 PM	Bypass valve opened
5/22/2011	5:24:25 PM	Helium MFC set to  100.000000
5/22/2011	5:24:25 PM	H2 MFC set to  0.000000
5/22/2011	5:24:25 PM	BCl3 MFC set to  0.000000
5/22/2011	5:24:25 PM	PHl3 MFC set to  0.000000
5/22/2011	5:24:25 PM	SiCl4 MFC set to  0.000000
5/22/2011	5:24:25 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	5:24:25 PM	Tube furnace set to 0
5/22/2011	5:25:25 PM	Helium valve closed
5/22/2011	5:25:25 PM	H2 valve closed
5/22/2011	5:25:25 PM	BCl3 valve closed
5/22/2011	5:25:25 PM	PH3 valve closed
5/22/2011	5:25:25 PM	SiCl4 pre valve closed
5/22/2011	5:25:25 PM	SiCl4 post valve closed
5/22/2011	5:25:25 PM	Bubbler valve closed
5/22/2011	5:25:25 PM	Main Vac valve opened
5/22/2011	5:25:25 PM	Bypass valve opened
5/22/2011	5:25:25 PM	Helium MFC set to  0.000000
5/22/2011	5:25:25 PM	H2 MFC set to  0.000000
5/22/2011	5:25:25 PM	BCl3 MFC set to  0.000000
5/22/2011	5:25:25 PM	PHl3 MFC set to  0.000000
5/22/2011	5:25:25 PM	SiCl4 MFC set to  0.000000
5/22/2011	5:25:25 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	5:25:25 PM	Tube furnace set to 0
5/22/2011	5:25:26 PM	Run finished at 5:25 PM
5/22/2011	5:25:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/22/2011	5:27:14 PM	Recipe started at 5:27 PM
5/22/2011	5:27:14 PM	Helium valve closed
5/22/2011	5:27:14 PM	BCl3 valve closed
5/22/2011	5:27:14 PM	PH3 valve closed
5/22/2011	5:27:14 PM	SiCl4 pre valve closed
5/22/2011	5:27:14 PM	SiCl4 post valve closed
5/22/2011	5:27:14 PM	Main Vac valve closed
5/22/2011	5:27:14 PM	Bypass valve closed
5/22/2011	5:27:14 PM	Bubbler valve closed
5/22/2011	5:27:14 PM	H2 valve opened
5/22/2011	5:27:14 PM	Helium MFC set to  0.000000
5/22/2011	5:27:14 PM	H2 MFC set to  500.000000
5/22/2011	5:27:14 PM	BCl3 MFC set to  0.000000
5/22/2011	5:27:14 PM	PHl3 MFC set to  0.000000
5/22/2011	5:27:14 PM	SiCl4 MFC set to  0.000000
5/22/2011	5:27:14 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	5:27:14 PM	Tube furnace set to 0
5/22/2011	5:28:34 PM	Helium valve closed
5/22/2011	5:28:34 PM	BCl3 valve closed
5/22/2011	5:28:34 PM	PH3 valve closed
5/22/2011	5:28:34 PM	SiCl4 pre valve closed
5/22/2011	5:28:34 PM	SiCl4 post valve closed
5/22/2011	5:28:34 PM	Main Vac valve closed
5/22/2011	5:28:34 PM	Bypass valve closed
5/22/2011	5:28:34 PM	H2 valve opened
5/22/2011	5:28:34 PM	Bubbler valve opened
5/22/2011	5:28:34 PM	Helium MFC set to  0.000000
5/22/2011	5:28:34 PM	H2 MFC set to  500.000000
5/22/2011	5:28:34 PM	BCl3 MFC set to  0.000000
5/22/2011	5:28:34 PM	PHl3 MFC set to  0.000000
5/22/2011	5:28:34 PM	SiCl4 MFC set to  0.000000
5/22/2011	5:28:34 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	5:28:34 PM	Tube furnace set to 250
5/22/2011	5:38:34 PM	Helium valve closed
5/22/2011	5:38:34 PM	BCl3 valve closed
5/22/2011	5:38:34 PM	PH3 valve closed
5/22/2011	5:38:34 PM	SiCl4 pre valve closed
5/22/2011	5:38:34 PM	SiCl4 post valve closed
5/22/2011	5:38:34 PM	Main Vac valve closed
5/22/2011	5:38:34 PM	Bypass valve closed
5/22/2011	5:38:34 PM	H2 valve opened
5/22/2011	5:38:34 PM	Bubbler valve opened
5/22/2011	5:38:34 PM	Helium MFC set to  0.000000
5/22/2011	5:38:34 PM	H2 MFC set to  500.000000
5/22/2011	5:38:34 PM	BCl3 MFC set to  0.000000
5/22/2011	5:38:34 PM	PHl3 MFC set to  0.000000
5/22/2011	5:38:34 PM	SiCl4 MFC set to  0.000000
5/22/2011	5:38:34 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	5:38:34 PM	Tube furnace set to 1000
5/22/2011	5:58:34 PM	Helium valve closed
5/22/2011	5:58:34 PM	BCl3 valve closed
5/22/2011	5:58:34 PM	Main Vac valve closed
5/22/2011	5:58:34 PM	Bypass valve closed
5/22/2011	5:58:34 PM	H2 valve opened
5/22/2011	5:58:34 PM	PH3 valve opened
5/22/2011	5:58:34 PM	SiCl4 pre valve opened
5/22/2011	5:58:34 PM	SiCl4 post valve opened
5/22/2011	5:58:34 PM	Bubbler valve opened
5/22/2011	5:58:34 PM	Helium MFC set to  0.000000
5/22/2011	5:58:34 PM	H2 MFC set to  500.000000
5/22/2011	5:58:34 PM	BCl3 MFC set to  0.000000
5/22/2011	5:58:34 PM	PHl3 MFC set to  1.000000
5/22/2011	5:58:34 PM	SiCl4 MFC set to  75.000000
5/22/2011	5:58:34 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	5:58:35 PM	Tube furnace set to 1000
5/22/2011	6:14:35 PM	H2 valve closed
5/22/2011	6:14:35 PM	BCl3 valve closed
5/22/2011	6:14:35 PM	PH3 valve closed
5/22/2011	6:14:35 PM	SiCl4 pre valve closed
5/22/2011	6:14:35 PM	SiCl4 post valve closed
5/22/2011	6:14:35 PM	Main Vac valve closed
5/22/2011	6:14:35 PM	Bypass valve closed
5/22/2011	6:14:35 PM	Helium valve opened
5/22/2011	6:14:35 PM	Bubbler valve opened
5/22/2011	6:14:35 PM	Helium MFC set to  500.000000
5/22/2011	6:14:35 PM	H2 MFC set to  0.000000
5/22/2011	6:14:35 PM	BCl3 MFC set to  0.000000
5/22/2011	6:14:35 PM	PHl3 MFC set to  0.000000
5/22/2011	6:14:35 PM	SiCl4 MFC set to  0.000000
5/22/2011	6:14:35 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	6:14:35 PM	Tube furnace set to 0
5/22/2011	6:34:35 PM	Helium valve closed
5/22/2011	6:34:35 PM	H2 valve closed
5/22/2011	6:34:35 PM	BCl3 valve closed
5/22/2011	6:34:35 PM	PH3 valve closed
5/22/2011	6:34:35 PM	SiCl4 pre valve closed
5/22/2011	6:34:35 PM	SiCl4 post valve closed
5/22/2011	6:34:35 PM	Main Vac valve closed
5/22/2011	6:34:35 PM	Bypass valve closed
5/22/2011	6:34:35 PM	Bubbler valve closed
5/22/2011	6:34:35 PM	Helium MFC set to  0.000000
5/22/2011	6:34:35 PM	H2 MFC set to  0.000000
5/22/2011	6:34:35 PM	BCl3 MFC set to  0.000000
5/22/2011	6:34:35 PM	PHl3 MFC set to  0.000000
5/22/2011	6:34:35 PM	SiCl4 MFC set to  0.000000
5/22/2011	6:34:35 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	6:34:35 PM	Tube furnace set to 0
5/22/2011	6:34:35 PM	Run finished at 6:34 PM
5/22/2011	6:37:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2011	6:37:10 PM	Recipe started at 6:37 PM
5/22/2011	6:37:10 PM	Helium valve closed
5/22/2011	6:37:10 PM	H2 valve closed
5/22/2011	6:37:10 PM	BCl3 valve closed
5/22/2011	6:37:10 PM	PH3 valve closed
5/22/2011	6:37:10 PM	SiCl4 pre valve closed
5/22/2011	6:37:10 PM	SiCl4 post valve closed
5/22/2011	6:37:10 PM	Main Vac valve closed
5/22/2011	6:37:10 PM	Bubbler valve closed
5/22/2011	6:37:10 PM	Bypass valve opened
5/22/2011	6:37:10 PM	Helium MFC set to  0.000000
5/22/2011	6:37:10 PM	H2 MFC set to  0.000000
5/22/2011	6:37:10 PM	BCl3 MFC set to  0.000000
5/22/2011	6:37:10 PM	PHl3 MFC set to  0.000000
5/22/2011	6:37:10 PM	SiCl4 MFC set to  0.000000
5/22/2011	6:37:10 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	6:37:10 PM	Tube furnace set to 0
5/22/2011	6:37:12 PM	Run aborted at 6:37 PM
5/22/2011	6:37:12 PM	Helium valve closed
5/22/2011	6:37:12 PM	H2 valve closed
5/22/2011	6:37:12 PM	BCl3 valve closed
5/22/2011	6:37:12 PM	PH3 valve closed
5/22/2011	6:37:12 PM	SiCl4 pre valve closed
5/22/2011	6:37:12 PM	SiCl4 post valve closed
5/22/2011	6:37:12 PM	Bypass valve closed
5/22/2011	6:37:12 PM	Main Vac valve closed
5/22/2011	6:37:12 PM	Bubbler valve closed
5/22/2011	6:37:12 PM	Helium MFC set to  0.000000
5/22/2011	6:37:12 PM	H2 MFC set to  0.000000
5/22/2011	6:37:12 PM	BCl3 MFC set to  0.000000
5/22/2011	6:37:12 PM	PHl3 MFC set to  0.000000
5/22/2011	6:37:12 PM	SiCl4 MFC set to  0.000000
5/22/2011	6:37:12 PM	Tube furnace set to 0
5/22/2011	6:37:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2011	6:37:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/22/2011	6:37:15 PM	Recipe started at 6:37 PM
5/22/2011	6:37:15 PM	H2 valve closed
5/22/2011	6:37:15 PM	BCl3 valve closed
5/22/2011	6:37:15 PM	PH3 valve closed
5/22/2011	6:37:15 PM	SiCl4 pre valve closed
5/22/2011	6:37:15 PM	SiCl4 post valve closed
5/22/2011	6:37:15 PM	Main Vac valve closed
5/22/2011	6:37:15 PM	Bypass valve closed
5/22/2011	6:37:15 PM	Bubbler valve closed
5/22/2011	6:37:15 PM	Helium valve opened
5/22/2011	6:37:15 PM	Helium MFC set to  500.000000
5/22/2011	6:37:15 PM	H2 MFC set to  0.000000
5/22/2011	6:37:15 PM	BCl3 MFC set to  0.000000
5/22/2011	6:37:15 PM	PHl3 MFC set to  0.000000
5/22/2011	6:37:15 PM	SiCl4 MFC set to  0.000000
5/22/2011	6:37:15 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	6:37:15 PM	Tube furnace set to 0
5/22/2011	6:37:41 PM	Helium valve closed
5/22/2011	6:37:41 PM	H2 valve closed
5/22/2011	6:37:41 PM	BCl3 valve closed
5/22/2011	6:37:41 PM	PH3 valve closed
5/22/2011	6:37:41 PM	SiCl4 pre valve closed
5/22/2011	6:37:41 PM	SiCl4 post valve closed
5/22/2011	6:37:41 PM	Main Vac valve closed
5/22/2011	6:37:41 PM	Bypass valve closed
5/22/2011	6:37:41 PM	Bubbler valve closed
5/22/2011	6:37:41 PM	Helium MFC set to  0.000000
5/22/2011	6:37:41 PM	H2 MFC set to  0.000000
5/22/2011	6:37:41 PM	BCl3 MFC set to  0.000000
5/22/2011	6:37:41 PM	PHl3 MFC set to  0.000000
5/22/2011	6:37:41 PM	SiCl4 MFC set to  0.000000
5/22/2011	6:37:41 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	6:37:42 PM	Tube furnace set to 0
5/22/2011	6:37:42 PM	Run finished at 6:37 PM
5/22/2011	6:37:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/22/2011	6:38:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/22/2011	6:38:51 PM	Recipe started at 6:38 PM
5/22/2011	6:38:51 PM	H2 valve closed
5/22/2011	6:38:51 PM	BCl3 valve closed
5/22/2011	6:38:51 PM	PH3 valve closed
5/22/2011	6:38:51 PM	SiCl4 pre valve closed
5/22/2011	6:38:51 PM	SiCl4 post valve closed
5/22/2011	6:38:51 PM	Main Vac valve closed
5/22/2011	6:38:51 PM	Bypass valve closed
5/22/2011	6:38:51 PM	Bubbler valve closed
5/22/2011	6:38:51 PM	Helium valve opened
5/22/2011	6:38:51 PM	Helium MFC set to  500.000000
5/22/2011	6:38:51 PM	H2 MFC set to  0.000000
5/22/2011	6:38:51 PM	BCl3 MFC set to  0.000000
5/22/2011	6:38:51 PM	PHl3 MFC set to  0.000000
5/22/2011	6:38:51 PM	SiCl4 MFC set to  0.000000
5/22/2011	6:38:51 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	6:38:51 PM	Tube furnace set to 0
5/22/2011	6:38:52 PM	Helium valve closed
5/22/2011	6:38:52 PM	H2 valve closed
5/22/2011	6:38:52 PM	BCl3 valve closed
5/22/2011	6:38:52 PM	PH3 valve closed
5/22/2011	6:38:52 PM	SiCl4 pre valve closed
5/22/2011	6:38:52 PM	SiCl4 post valve closed
5/22/2011	6:38:52 PM	Main Vac valve closed
5/22/2011	6:38:52 PM	Bypass valve closed
5/22/2011	6:38:52 PM	Bubbler valve closed
5/22/2011	6:38:52 PM	Helium MFC set to  0.000000
5/22/2011	6:38:52 PM	H2 MFC set to  0.000000
5/22/2011	6:38:52 PM	BCl3 MFC set to  0.000000
5/22/2011	6:38:52 PM	PHl3 MFC set to  0.000000
5/22/2011	6:38:52 PM	SiCl4 MFC set to  0.000000
5/22/2011	6:38:52 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	6:38:52 PM	Tube furnace set to 0
5/22/2011	6:38:52 PM	Run finished at 6:38 PM
5/22/2011	6:38:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/22/2011	6:40:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/22/2011	6:40:53 PM	Recipe started at 6:40 PM
5/22/2011	6:40:53 PM	H2 valve closed
5/22/2011	6:40:53 PM	BCl3 valve closed
5/22/2011	6:40:53 PM	PH3 valve closed
5/22/2011	6:40:53 PM	SiCl4 pre valve closed
5/22/2011	6:40:53 PM	SiCl4 post valve closed
5/22/2011	6:40:53 PM	Main Vac valve closed
5/22/2011	6:40:53 PM	Bypass valve closed
5/22/2011	6:40:53 PM	Bubbler valve closed
5/22/2011	6:40:53 PM	Helium valve opened
5/22/2011	6:40:53 PM	Helium MFC set to  500.000000
5/22/2011	6:40:53 PM	H2 MFC set to  0.000000
5/22/2011	6:40:53 PM	BCl3 MFC set to  0.000000
5/22/2011	6:40:53 PM	PHl3 MFC set to  0.000000
5/22/2011	6:40:53 PM	SiCl4 MFC set to  0.000000
5/22/2011	6:40:53 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	6:40:53 PM	Tube furnace set to 0
5/22/2011	6:40:54 PM	Helium valve closed
5/22/2011	6:40:54 PM	H2 valve closed
5/22/2011	6:40:54 PM	BCl3 valve closed
5/22/2011	6:40:54 PM	PH3 valve closed
5/22/2011	6:40:54 PM	SiCl4 pre valve closed
5/22/2011	6:40:54 PM	SiCl4 post valve closed
5/22/2011	6:40:54 PM	Main Vac valve closed
5/22/2011	6:40:54 PM	Bypass valve closed
5/22/2011	6:40:54 PM	Bubbler valve closed
5/22/2011	6:40:54 PM	Helium MFC set to  0.000000
5/22/2011	6:40:54 PM	H2 MFC set to  0.000000
5/22/2011	6:40:54 PM	BCl3 MFC set to  0.000000
5/22/2011	6:40:54 PM	PHl3 MFC set to  0.000000
5/22/2011	6:40:54 PM	SiCl4 MFC set to  0.000000
5/22/2011	6:40:54 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	6:40:54 PM	Tube furnace set to 0
5/22/2011	6:40:55 PM	Run finished at 6:40 PM
5/22/2011	6:40:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/22/2011	6:44:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2011	6:44:34 PM	Recipe started at 6:44 PM
5/22/2011	6:44:34 PM	Helium valve closed
5/22/2011	6:44:34 PM	H2 valve closed
5/22/2011	6:44:34 PM	BCl3 valve closed
5/22/2011	6:44:34 PM	PH3 valve closed
5/22/2011	6:44:34 PM	SiCl4 pre valve closed
5/22/2011	6:44:34 PM	SiCl4 post valve closed
5/22/2011	6:44:34 PM	Main Vac valve closed
5/22/2011	6:44:34 PM	Bubbler valve closed
5/22/2011	6:44:34 PM	Bypass valve opened
5/22/2011	6:44:34 PM	Helium MFC set to  0.000000
5/22/2011	6:44:34 PM	H2 MFC set to  0.000000
5/22/2011	6:44:34 PM	BCl3 MFC set to  0.000000
5/22/2011	6:44:34 PM	PHl3 MFC set to  0.000000
5/22/2011	6:44:34 PM	SiCl4 MFC set to  0.000000
5/22/2011	6:44:34 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	6:44:34 PM	Tube furnace set to 0
5/22/2011	6:44:40 PM	Run aborted at 6:44 PM
5/22/2011	6:44:40 PM	Helium valve closed
5/22/2011	6:44:40 PM	H2 valve closed
5/22/2011	6:44:40 PM	BCl3 valve closed
5/22/2011	6:44:40 PM	PH3 valve closed
5/22/2011	6:44:40 PM	SiCl4 pre valve closed
5/22/2011	6:44:40 PM	SiCl4 post valve closed
5/22/2011	6:44:40 PM	Bypass valve closed
5/22/2011	6:44:40 PM	Main Vac valve closed
5/22/2011	6:44:40 PM	Bubbler valve closed
5/22/2011	6:44:40 PM	Helium MFC set to  0.000000
5/22/2011	6:44:40 PM	H2 MFC set to  0.000000
5/22/2011	6:44:40 PM	BCl3 MFC set to  0.000000
5/22/2011	6:44:40 PM	PHl3 MFC set to  0.000000
5/22/2011	6:44:40 PM	SiCl4 MFC set to  0.000000
5/22/2011	6:44:40 PM	Tube furnace set to 0
5/22/2011	6:44:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2011	6:44:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/22/2011	6:44:41 PM	Recipe started at 6:44 PM
5/22/2011	6:44:41 PM	H2 valve closed
5/22/2011	6:44:41 PM	BCl3 valve closed
5/22/2011	6:44:41 PM	PH3 valve closed
5/22/2011	6:44:41 PM	SiCl4 pre valve closed
5/22/2011	6:44:41 PM	SiCl4 post valve closed
5/22/2011	6:44:41 PM	Main Vac valve closed
5/22/2011	6:44:41 PM	Bypass valve closed
5/22/2011	6:44:41 PM	Bubbler valve closed
5/22/2011	6:44:41 PM	Helium valve opened
5/22/2011	6:44:41 PM	Helium MFC set to  500.000000
5/22/2011	6:44:41 PM	H2 MFC set to  0.000000
5/22/2011	6:44:41 PM	BCl3 MFC set to  0.000000
5/22/2011	6:44:41 PM	PHl3 MFC set to  0.000000
5/22/2011	6:44:41 PM	SiCl4 MFC set to  0.000000
5/22/2011	6:44:41 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	6:44:41 PM	Tube furnace set to 0
5/22/2011	6:45:03 PM	Run aborted at 6:45 PM
5/22/2011	6:45:03 PM	Helium valve closed
5/22/2011	6:45:03 PM	H2 valve closed
5/22/2011	6:45:03 PM	BCl3 valve closed
5/22/2011	6:45:03 PM	PH3 valve closed
5/22/2011	6:45:03 PM	SiCl4 pre valve closed
5/22/2011	6:45:03 PM	SiCl4 post valve closed
5/22/2011	6:45:03 PM	Bypass valve closed
5/22/2011	6:45:03 PM	Main Vac valve closed
5/22/2011	6:45:03 PM	Bubbler valve closed
5/22/2011	6:45:03 PM	Helium MFC set to  0.000000
5/22/2011	6:45:03 PM	H2 MFC set to  0.000000
5/22/2011	6:45:03 PM	BCl3 MFC set to  0.000000
5/22/2011	6:45:03 PM	PHl3 MFC set to  0.000000
5/22/2011	6:45:03 PM	SiCl4 MFC set to  0.000000
5/22/2011	6:45:03 PM	Tube furnace set to 0
5/22/2011	6:45:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/22/2011	6:45:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2011	6:45:06 PM	Recipe started at 6:45 PM
5/22/2011	6:45:06 PM	Helium valve closed
5/22/2011	6:45:06 PM	H2 valve closed
5/22/2011	6:45:06 PM	BCl3 valve closed
5/22/2011	6:45:06 PM	PH3 valve closed
5/22/2011	6:45:06 PM	SiCl4 pre valve closed
5/22/2011	6:45:06 PM	SiCl4 post valve closed
5/22/2011	6:45:06 PM	Main Vac valve closed
5/22/2011	6:45:06 PM	Bubbler valve closed
5/22/2011	6:45:06 PM	Bypass valve opened
5/22/2011	6:45:06 PM	Helium MFC set to  0.000000
5/22/2011	6:45:06 PM	H2 MFC set to  0.000000
5/22/2011	6:45:06 PM	BCl3 MFC set to  0.000000
5/22/2011	6:45:06 PM	PHl3 MFC set to  0.000000
5/22/2011	6:45:06 PM	SiCl4 MFC set to  0.000000
5/22/2011	6:45:06 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	6:45:06 PM	Tube furnace set to 0
5/22/2011	6:45:31 PM	Helium valve closed
5/22/2011	6:45:31 PM	H2 valve closed
5/22/2011	6:45:31 PM	BCl3 valve closed
5/22/2011	6:45:31 PM	PH3 valve closed
5/22/2011	6:45:31 PM	SiCl4 pre valve closed
5/22/2011	6:45:31 PM	SiCl4 post valve closed
5/22/2011	6:45:31 PM	Bubbler valve closed
5/22/2011	6:45:31 PM	Main Vac valve opened
5/22/2011	6:45:31 PM	Bypass valve opened
5/22/2011	6:45:31 PM	Helium MFC set to  0.000000
5/22/2011	6:45:31 PM	H2 MFC set to  0.000000
5/22/2011	6:45:31 PM	BCl3 MFC set to  0.000000
5/22/2011	6:45:31 PM	PHl3 MFC set to  0.000000
5/22/2011	6:45:31 PM	SiCl4 MFC set to  0.000000
5/22/2011	6:45:31 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	6:45:31 PM	Tube furnace set to 0
5/22/2011	6:45:31 PM	Run finished at 6:45 PM
5/22/2011	6:45:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2011	6:45:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/22/2011	6:45:57 PM	Recipe started at 6:45 PM
5/22/2011	6:45:57 PM	Helium valve closed
5/22/2011	6:45:57 PM	H2 valve closed
5/22/2011	6:45:57 PM	BCl3 valve closed
5/22/2011	6:45:57 PM	PH3 valve closed
5/22/2011	6:45:57 PM	SiCl4 pre valve closed
5/22/2011	6:45:57 PM	SiCl4 post valve closed
5/22/2011	6:45:57 PM	Main Vac valve closed
5/22/2011	6:45:57 PM	Bypass valve closed
5/22/2011	6:45:57 PM	Bubbler valve closed
5/22/2011	6:45:57 PM	Helium MFC set to  0.000000
5/22/2011	6:45:57 PM	H2 MFC set to  0.000000
5/22/2011	6:45:57 PM	BCl3 MFC set to  0.000000
5/22/2011	6:45:57 PM	PHl3 MFC set to  0.000000
5/22/2011	6:45:57 PM	SiCl4 MFC set to  0.000000
5/22/2011	6:45:57 PM	Bypass solenoid MFC set to  0.000000
5/22/2011	6:45:57 PM	Tube furnace set to 0
5/22/2011	6:45:57 PM	Run finished at 6:45 PM
5/22/2011	6:45:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
